STTR Phase I: Microhydraulic Actuator for High-Accuracy, High-Speed Position Stages

STTR 第一阶段：用于高精度、高速位置平台的微液压执行器

• 批准号: 2335170
• 负责人: Tairan Wang
• 金额: $ 27.5万
• 依托单位: SANGTERA INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2024
• 资助国家: 美国
• 起止时间: 2024-01-15 至 2025-01-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2335170&HistoricalAwards=false
• 关键词: STTR; Phase; Microhydraulic; Actuator; Accuracy

The broader impact/commercial potential of this Small Business Technology Transfer (STTR) Phase I project is to develop the key technology to enable the building of high-precision, high-throughput, semiconductor advanced packaging systems to enable broad adoption of the 3D integration of chiplets for next generation high-performance computing. With the rapid increase in the need for computing power associated with artificial intelligence development, self-driving cars, and next generation mobile devices, the semiconductor industry is transitioning to integrate semiconductor devices in 3D. This technology will extend the growth curve known as Moore’s Law beyond the limit of packing additional transistors onto individual chips. This project may also demonstrate the general feasibility of microhydraulic actuator technology, paving way for its development and applications in other fields of robotics. This Small Business Technology Transfer (STTR) Phase I project seeks to control electronics and design protocols to reach 100 nm in position accuracy in the design of semiconductor advanced packaging systems. The high-speed position stage will be based on the microhydraulic actuator technology and provide an improvement of 100x over the as designed step size. The team will develop the necessary electronics, hardware, control software, and measurement techniques to achieve the position accuracy, while maintaining the high responsiveness of the microhydraulic actuator. The plan includes assembling test actuators, developing and testing the control hardware and software, as well as establishing the capabilities of position measurement systems based on charge control, capacitance feedback and optical image feedback. The team will use these measurement systems to assess the movement accuracy and precision of the actuator and its control system.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该小型企业技术转移（STTR）I阶段项目的更广泛的影响/商业潜力是开发关键技术，以构建高精度，高通用，半导体高级包装系统，以便广泛采用chiplets的3D整合以进行下一代高性能计算。随着与人工智能开发，自动驾驶汽车和下一代移动设备相关的计算能力需求的迅速增加，半导体行业正在向3D中的集成半导体设备过渡。这项技术将将被称为摩尔定律的增长曲线扩展到将其他变压器包装到单个芯片上的极限之外。该项目还可以证明微液压执行器技术的一般可行性，为其开发以及在其他机器人技术领域的应用铺平方法。这个小型企业技术转移（STTR）I阶段项目旨在控制电子和设计协议，以达到100 nm的半导体高级包装系统设计。高速位置阶段将基于微液压执行器技术，并在AS设计的步骤尺寸上提供100倍的改进。该团队将开发必要的电子，硬件，控制软件和测量技术，以达到位置准确性，同时保持微氢气执行器的高响应能力。该计划包括组装测试执行器，开发和测试控制硬件和软件，以及基于电荷控制，电容反馈和光学图像反馈的位置测量系统的功能。该团队将使用这些测量系统来评估执行器及其控制系统的运动准确性和精度。该奖项反映了NSF的法定任务，并使用基金会的知识分子优点和更广泛的影响评估标准，被认为值得通过评估来获得支持。