SBIR Phase I: Post-CMOS Ionic Liquid Electrochemical Gas Sensors

SBIR 第一阶段：后 CMOS 离子液体电化学气体传感器

• 批准号: 1913640
• 负责人: Yue Huang
• 金额: $ 22.5万
• 依托单位: LABSYS LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-07-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1913640&HistoricalAwards=false
• 关键词: SBIR; Phase; Post; CMOS; Ionic

The broader/commercial impact of this Small Business Innovation Research (SBIR) Phase I project is the development of accurate, fast, miniaturized and low-cost gas sensors that are suitable for integration into internet of things (IoT) devices. Successful commercial implementation of the proposed sensors would broadly benefit society. IoT devices incorporating those sensors such as smartphones and wearables can directly help 10 million asthma patients in the US and billions of air pollutant vulnerable people worldwide. These devices enhance safety by detecting dangerous conditions such as a gas leak or gas build-up in a utility, industrial plant or transportation facility. Sharing information across networks of IoT devices provides more accurate temporal and spatial gas information, promoting public safety by making the information available to emergency response and regulatory enforcement personnel. The competitive advantages of the proposed sensor over other gas sensor technologies can be transformed into commercial success by filling the market vacancy into previously inaccessible devices like smartphones. Resulting project activities would also benefit science, education and local communities by advancing the research frontier on electrochemistry and nurturing cross-disciplinary entrepreneurship with IoT applications.The proposed project brings together state-of-the-art microfabrication methods and the most recent developments of electrochemical gas sensing technology to reinvent the traditional electrochemical gas sensor. The Phase I feasibility research focuses on overcoming the unmet challenges of electrochemical gas sensor miniaturization and liquid electrolyte handling in microfabrication processes. An innovative microfabricated structure is proposed using semiconductor-compatible manufacturing processes. Sensor stability is proposed to be studied in the context of the electrode-electrolyte interface, a not well understood area. The proposed microfabricated structures bring a new quantitative perspective to the electrode-electrolyte interface study and may generate new knowledge on fundamentals to help improve sensor performance. The proposed research activity is expected to achieve a carbon monoxide sensor of 2x2x0.5mm form factor that consumes sub micro amps of current, demonstrated by an IoT sensor network platform. In Phase II, sensors of more gases, including ozone, nitric oxide, methane, etc. will be implemented on a complementary metal oxide semiconductor (CMOS) integrated circuit (IC) containing potentiostats and a data converter through post-CMOS microfabrication processes.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项小型企业创新研究（SBIR）I阶段项目的更广泛/商业影响是准确，快速，微型和低成本的气体传感器的开发，这些传感器适合集成到物联网（IoT）设备中。拟议的传感器的成功商业实施将广泛地使社会受益。结合这些传感器（例如智能手机和可穿戴设备）的物联网设备可以直接帮助美国1000万哮喘患者以及全球数十亿个空气污染物易受伤害的人。这些设备通过检测危险条件（例如公用事业，工业工厂或运输设施中的气体积聚）来提高安全性。跨物联网设备网络共享信息提供了更准确的时间和空间天然气信息，从而通过使该信息可用于紧急响应和监管执法人员来促进公共安全。拟议的传感器比其他燃气传感器技术的竞争优势可以通过将市场空缺填充到智能手机等以前无法接近的设备中，从而将其转变为商业成功。最终的项目活动还将通过提高电化学的研究前沿和通过物联网应用来培育跨学科的企业家精神，从而使科学，教育和当地社区受益。该项目汇集了最新的微型制造方法以及最新的电化学气体传感技术的最新发展，从而使传统的电化学传感器改造了传统的电子电化学传感器。第一阶段的可行性研究重点是克服微加工过程中电化学气体传感器微型化和液体电解质处理的未满足挑战。 使用与半导体兼容的制造过程提出了创新的微型制造结构。提议在电极 - 电解质界面的背景下研究传感器稳定性，这是一个不太了解的区域。提出的微型制造结构为电极 - 电解质界面研究带来了新的定量透视图，并可能产生有关基础知识的新知识，以帮助提高传感器的性能。提出的研究活动有望获得2x2x0.5mm外形的一氧化碳传感器，该传感器由IoT传感器网络平台所证明，该碳均消耗了电流的亚微放大器。 In Phase II, sensors of more gases, including ozone, nitric oxide, methane, etc. will be implemented on a complementary metal oxide semiconductor (CMOS) integrated circuit (IC) containing potentiostats and a data converter through post-CMOS microfabrication processes.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts审查标准。