Novel three dimensional shape measurement technique for fast rotating objects

用于快速旋转物体的新型三维形状测量技术

• 批准号: 235791889
• 负责人: Professor Dr.-Ing. Jürgen W. Czarske
• 金额: --
• 依托单位: Fachbereich 5.2 - Dimensionelle Nanometrologie
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2013
• 资助国家: 德国
• 起止时间: 2012-12-31 至 2019-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/235791889?language=en
• 关键词: Novel; three; dimensional; shape; measurement

The measurement of shape und position of fast rotating workpieces with sub-micron precision enables important advances in process technology. During the first funding period a novel laser Doppler distance sensor (P-LDD Sensor) was investigated systemically. The P-LDD sensor system employs the simultaneous measurement of the lateral surface velocity and the axial surface distance, in order to measure the absolute shape and position of rotation axis with keyhole access. A scientific breakthrough was accomplished. The measurement uncertainty has been reduced by more than one magnitude by observing the scattered light under different angles and employing novel signal evaluation. Furthermore, the P-LDD sensor system was integrated into a lathe (cooperation with PTB in Braunschweig) and the shape of a workpiece was measured with a standard deviation of 300 nm also at high lateral surface velocities. However, the total measurement uncertainty for this novel system is currently limited by speckle noise and thermal drifts of the calibration functions. Additionally, the lateral resolution is limiting the application of the sensor to measurements of macro geometric features.Therefore, the aim of the proposed second funding period is to reduce the measurement uncertainty due to the speckle effect and due to drifts of the calibration functions (systematic uncertainties) as well as to increase the lateral resolution. This will enable macro- and micro-geometric shape measurements with sub-micron uncertainty at rotating objects. For this purpose cameras will be introduced to the system instead of single detectors and novel image processing for moving speckle pattern will be applied and fundamentally investigated. The image processing will enable an evaluation of single speckles. Therefore phase jumps, which currently occur in the detector signal will be eliminated. Preliminary, numerical experiments show a reduction of the speckle induced measurement deviations. Using a matrix camera and an extended image processing enables an in-situ calibration additionally, which will be applied and characterized to reduce systematic deviations. Furthermore, the extension of the P-LDD sensor system by a camera enables an increased lateral resolution. Thus, micro-geometric features of free form parts can be resolved additionally to the shape in-situ.

以亚微米精度测量快速旋转工件的形状和位置可实现工艺技术的重大进步。在第一个资助期间，系统地研究了一种新型激光多普勒距离传感器（P-LDD 传感器）。 P-LDD传感器系统采用同时测量横向表面速度和轴向表面距离，以通过钥匙孔测量旋转轴的绝对形状和位置。实现了科学突破。通过观察不同角度下的散射光并采用新颖的信号评估，测量不确定度已降低一个数量级以上。此外，将 P-LDD 传感器系统集成到车床中（与布伦瑞克的 PTB 合作），并且在高横向表面速度下也以 300 nm 的标准偏差测量工件的形状。然而，这种新颖系统的总测量不确定度目前受到散斑噪声和校准函数热漂移的限制。此外，横向分辨率限制了传感器在宏观几何特征测量中的应用。因此，拟议的第二个资助期的目的是减少由于散斑效应和校准函数漂移（系统不确定性）以及增加横向分辨率。这将使旋转物体的宏观和微观几何形状测量具有亚微米的不确定性。为此，将在系统中引入摄像机而不是单个探测器，并且将应用和根本性研究用于移动散斑图案的新颖图像处理。图像处理将能够评估单个散斑。因此，当前在检测器信号中出现的相位跳变将被消除。初步的数值实验表明散斑引起的测量偏差有所减少。使用矩阵相机和扩展的图像处理可以额外实现原位校准，这将被应用和表征以减少系统偏差。此外，通过相机扩展 P-LDD 传感器系统可以提高横向分辨率。因此，除了原位形状之外，还可以解析自由形状零件的微观几何特征。

项目成果

Miniaturized interferometric 3-D shape sensor using coherent fiber bundles

使用相干光纤束的微型干涉式 3D 形状传感器

• DOI: 10.1016/j.optlaseng.2018.04.011
• 发表时间: 2018-08-01
• 期刊: Optics and Lasers in Engineering
• 影响因子: 4.6
• 作者: Haoyang Zhang;R. Kuschmierz;J. Czarske
• 通讯作者: J. Czarske

Camera-based speckle noise reduction for 3-D absolute shape measurements.

基于相机的散斑降噪，用于 3D 绝对形状测量

• DOI: 10.1364/oe.24.012130
• 发表时间: 2016
• 期刊: Optics express
• 影响因子: 3.8
• 作者: H. Zhang; R. Kuschmierz; J. Czarske;A. Fischer
• 通讯作者: A. Fischer

Non-contact, bi-directional tool tip vibration measurement in CNC milling machines with a single optical sensor

使用单个光学传感器在数控铣床上进行非接触式双向刀尖振动测量

• DOI: 10.1016/j.ymssp.2020.106647
• 发表时间: 2020-05-01
• 期刊: Mechanical Systems and Signal Processing
• 影响因子: 8.4
• 作者: Haoyang Zhang;Damian Anders;Michael Löser;S. Ihlenfeldt;J. Czarske;R. Kuschmierz
• 通讯作者: R. Kuschmierz