Principal effects of ternary oxide dielectric layers on SPR sensors for gas sensing with ellipsometric readout

三元氧化物介电层对椭圆偏振读出气体传感 SPR 传感器的主要影响

基本信息

批准号：
234234843
负责人：
Dr. Andreas Hertwig
金额：
--
依托单位：
Bundesanstalt für Materialforschung und -prüfung (BAM)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2013
资助国家：
德国
起止时间：
2012-12-31 至 2015-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/234234843?language=en
关键词：
Principal effects ternary oxide dielectric

项目摘要

The joint project between BAM, Federal Institute for Materials Research and Testing in Berlin and UJEP, the Jan Evangelista Purkyne University in Usti nad Labem aims to investigate new SPR-based gas sensors containing gold layers with thin dielectric overcoatings. Gold layers as SPR devices will be coated with several different additional oxide layers, such as SnO2, ZnO, TiO2, doped with different other metal ions. The main matrix systems investigated will be SnO2 and ZnO. The underlying gold SPR sensor layers will be produced in the coatings lab at BAM and then modified with sputtered oxide layers in the coatings lab at UJEP. These layer systems will be analysed by means of different spectroscopic ellipsometry to evaluate their dielectric function depending on the doping material and its concentration. Subsequently, gas sensing studies will be carried out with these systems evaluating the changes in sensitivity and long-term stability regarding different gasses and gas mixtures. In this case, the gas carbon monoxide is of special interest. The aim of these studies is to find a correlation between the dopant type and concentration of these layers and their properties as gas-sensing devices. The project part located at BAM and proposed for funding hereby will comprise ellipsometric analysis on the manufactured multilayer systems as well as SPR gas sensing measurements using laser ellipsometry as the detector. Further, an Infrared reflectometry / ellipsometry experiment will be built and used to study the adsorbed gas layer and the chemisorption process in the Fe:SnO2 / CO sensing system.

柏林联邦材料研究与测试研究所与UJEP的联合项目，USTI NAD NAD LABEM的Jan Evangelista Purkyne大学旨在调查含有含有薄电介质过度涂料的金层的新的基于SPR的燃气传感器。金层作为SPR设备将涂有几个不同的氧化物层，例如Sno2，ZnO，TiO2，掺有不同的金属离子。研究的主要矩阵系统将是SNO2和ZnO。下面的金SPR传感器层将在BAM的涂料实验室中产生，然后在UJEP的涂料实验室中用溅射的氧化物层进行修饰。这些层系统将通过不同的光谱椭圆法对这些层系统进行分析，以根据掺杂材料及其浓度来评估其介电功能。随后，将使用这些系统进行气体传感研究，以评估不同气体和气体混合物的灵敏度和长期稳定性的变化。在这种情况下，一氧化碳是特别感兴趣的。这些研究的目的是找到这些层的掺杂剂类型与浓度之间的相关性及其作为气体感应器件的性质。位于BAM的项目部分并提议进行资金，其中包括对制成的多层系统的椭圆分析，以及使用激光椭圆法作为检测器的SPR气体传感测量值。此外，将建立和用于研究Fe：SNO2 / CO传感系统中的吸附气体层和化学吸附过程的红外反射仪 /椭圆测量实验。