SBIR Phase I: Lithographic Patterning of Multiple Porous Crystalline Thin Films on Working Silicon Devices for Gas Sensing Applications

SBIR 第一阶段：用于气体传感应用的工作硅器件上的多个多孔晶体薄膜的光刻图案化

• 批准号: 1520563
• 负责人: Steve Yamamoto
• 金额: $ 15万
• 依托单位: Matrix Sensors Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-07-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1520563&HistoricalAwards=false
• 关键词: SBIR; Phase; Lithographic; Patterning; Multiple

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase I project is to enable a new class of gas sensors for the consumer market, specifically in wearables, Internet of Things and smartphones. The technology proposed will sense multiple gases using an inexpensive, compact device with small power requirement. Traditional sensing technology requires a separate device for each gas, making wearable or portable devices impractical. These new devices will be applied in indoor air quality monitoring products such as thermostats, smart lighting, and surveillance cameras; and indoor and outdoor air quality monitoring for wearables and smartphones. These are emerging consumer use cases that could easily exceed 1B units by 2020. The importance of distributed air quality monitoring has been highlighted by recent reports that identify indoor pollution as a significant fraction of the overall pollution exposure for many people. Indoor pollutants vary widely based on the appliances and ventilation used in a particular home or commercial setting, which necessitates continuous monitoring in order to address the problem. There is currently no gas sensor technology capable of delivering this performance with acceptable cost, size, and power requirement.This Small Business Innovation Research (SBIR) Phase I project will build a foundation for the incorporation of porous crystalline hybrid materials into electronic devices. Porous crystalline hybrids have emerged in recent years as a highly attractive class of materials for a host of applications including sensing, catalysis, gas separation, and low-k dielectric materials. For many of these applications the materials must be incorporated into an electronic device as a thin film coating. The techniques for lithographic deposition of these materials, in particular the operating conditions they can endure after being deposited, are almost completely unexplored. Deposition of multiple different porous crystalline hybrids has not been demonstrated. This proposal aims to overcome these obstacles by identifying conditions for reversible protection of porous crystalline hybrid materials during subsequent deposition steps. We anticipate that this work will form the basis for incorporating porous crystals into devices both for gas sensors and for other applications.

这项小型企业创新研究（SBIR）I阶段项目的更广泛的影响/商业潜力是为消费市场，特别是可穿戴设备，物品和智能手机提供新的气体传感器。 提出的技术将使用具有较小功率要求的廉价，紧凑的设备感知多种气体。 传统的传感技术需要为每种气体提供一个单独的设备，使可穿戴或便携式设备不切实际。 这些新设备将用于室内空气质量监测产品，例如恒温器，智能照明和监视摄像头。以及可穿戴设备和智能手机的室内和室外空气质量监控。 这些是新兴的消费者用例，到2020年，它们很容易超过1B单位。最近的报告强调了分布式空气质量监测的重要性，这些报告识别出室内污染是许多人的整体污染暴露的很大一部分。 室内污染物根据特定家庭或商业环境中使用的设备和通风差异很大，这需要连续监测以解决该问题。 目前，没有能够以可接受的成本，大小和功率要求来提供此性能的气体传感器技术。这项小型企业创新研究（SBIR）I阶段项目将为将多孔结晶混合材料纳入电子设备而建立一个基础。 近年来，多孔的晶体杂种已成为一种非常有吸引力的材料，用于多种应用，包括感应，催化，气体分离和低K介电材料。 对于这些应用中的许多应用，必须将材料作为薄膜涂层合并到电子设备中。 这些材料的光刻沉积技术，尤其是沉积后它们可以忍受的工作条件，几乎完全没有探索。 尚未证明多种多孔晶体杂种的沉积。 该建议旨在通过确定可逆保护多孔晶体杂种材料在随后的沉积步骤中克服这些障碍。 我们预计这项工作将构成将多孔晶体纳入气体传感器和其他应用的设备的基础。