EAGER: Investigation and Optimization of Thermoelectric Properties of Highly-Doped Polysilicon Nanowires

EAGER：高掺杂多晶硅纳米线热电性能的研究和优化

• 批准号: 1355488
• 负责人: Reza Abdolvand
• 金额: $ 14.41万
• 依托单位: Oklahoma State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-10-01 至 2014-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1355488&HistoricalAwards=false
• 关键词: EAGER; Investigation; Optimization; Thermoelectric; Properties

The objective of this project is to develop a robust fabrication process for manufacturing micro-structures that will be used to measure the thermoelectric properties of polysilicon nanowires and subsequently to generate guidelines for optimizing the thermoelectric figure of merit in polysilicon nanowires. The effect of size, deposition parameters, and doping type/concentration on the figure of merit will be studied. The intellectual merit is in filling the existing knowledge gap about thermoelectric properties of polysilicon nanowires. Such nanowires have an immediate application in developing high-performance IR sensors. Despite earlier reports on enhanced thermoelectric properties of silicon nanowires, there has been no report of practical thermoelectric devices that function based on such superior properties. This is mainly due to the complex process of growth and transfer of silicon nanowires, which hinders the batch-fabrication of such devices. The results of this research can potentially transform this status since polysilicon nanowires can be fabricated through conventional microfabrication processes and nanoscale lithography. This creates a unique opportunity for production of novel thermoelectric devices that take advantage of enhanced properties of nanowires.The broader impact is envisioned in enabling low-cost and high-performance IR detectors with widespread usage in military, civilian, and medical diagnostic applications, where cost effective solutions with adequate performance do not exist. The funds received for the proposed research activities will also allow the PI to recruit and train local talents with priority given to underrepresented minorities and also will produce material for graduate level courses on micro/nano-systems.

该项目的目标是开发一种稳健的制造工艺来制造微结构，该微结构将用于测量多晶硅纳米线的热电性能，并随后生成优化多晶硅纳米线热电品质因数的指南。将研究尺寸、沉积参数和掺杂类型/浓度对品质因数的影响。其智力优势在于填补了有关多晶硅纳米线热电特性的现有知识空白。这种纳米线可直接应用于开发高性能红外传感器。尽管早期有关于硅纳米线增强热电性能的报道，但目前还没有基于这种优异性能发挥作用的实用热电装置的报道。这主要是由于硅纳米线的生长和转移过程复杂，阻碍了此类器件的批量制造。这项研究的结果可能会改变这种状况，因为多晶硅纳米线可以通过传统的微加工工艺和纳米级光刻来制造。这为生产利用纳米线增强特性的新型热电器件创造了独特的机会。预计将产生更广泛的影响，使低成本和高性能的红外探测器广泛应用于军事、民用和医疗诊断应用，其中具有足够性能的成本有效的解决方案并不存在。拟议研究活动收到的资金还将允许 PI 招募和培训当地人才，优先考虑代表性不足的少数族裔，并将为微/纳米系统研究生水平课程制作材料。