Templated Self-Assembly for Nanomanufacturing

用于纳米制造的模板化自组装

• 批准号: 1234169
• 负责人: Karl Berggren
• 金额: $ 40.5万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-15 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1234169&HistoricalAwards=false
• 关键词: Templated; Self; Assembly; Nanomanufacturing

In this project, new nanopatterning methods will be researched for manufacturing based on two self-assembly model systems: (1) block copolymers; and (2) collapsing nanopillars. For both of these technologies, analytical models will be developed explaining the interaction between topographic templates the self-assembling action of the system. Along with the analytical model, numerical simulation will be used to simulate the 3-D structures. A conceptual framework for pattern design based on computation and digital logic will then be developed. In the particular case of block copolymers, central to the technological development will be the implementation of localized annealing methods. In the case of collapsing nanopillars, processing methods for inducing localized and directed collapse will be developed. Based on the analytical model, numerical simulation, the new experimental methods, and the computational framework, a new approach for generating complex nanopatterns will be demonstrated using both of these approaches. As the result of this work, new nanomanufacturing methods that can fabricate complex nanopatterns with throughput higher than that of conventional lithographic methods will be developed. The primary goal of this study is controlling the self-assembly process based on the understanding of the force or interaction governing the self-assembly process of two model systems. The control may include fabricating complex nanopatterns such as bends, jogs, or T-junctions that can be used for integrated circuit fabrication or for fabrication of large-scale nanopatterns for new applications in photonics, energy harvesting, and electronics. As a result of the control of self-assembly to be achieved in this study, the capabilities of nanomanufacturing methods will be expanded, while their costs are reduced.

在这个项目中，将研究新的纳米图案方法，以基于两个自组装模型系统制造：（1）块共聚物； （2）崩溃的纳米柱。对于这两种技术，将开发分析模型，以解释地形模板之间的相互作用。系统的自组装作用。与分析模型一起，数值模拟将用于模拟3D结构。然后将开发基于计算和数字逻辑的模式设计的概念框架。在块共聚物的特殊情况下，技术发展的核心将是局部退火方法的实施。在崩溃的纳米木中，将开发用于诱导局部和定向崩溃的处理方法。基于分析模型，数值仿真，新的实验方法和计算框架，将使用这两种方法来证明一种新的用于生成复杂纳米模式的方法。作为这项工作的结果，将开发出可以制造具有高于常规光刻方法的复杂纳米模式的新纳米制造方法。这项研究的主要目标是基于对两个模型系统自组装过程的力或相互作用的理解来控制自组装过程。该控件可能包括制造复杂的纳米模式，例如弯曲，慢跑或T式界面，可用于集成电路制造，或用于制造用于光子，能量收集和电子产品的新应用的大型纳米模式。由于控制了本研究中要实现的自组装的结果，纳米制造方法的能力将扩大，而其成本则降低。