EAGER: Ionic Liquid Ion Sources and Nanomanufacturing

EAGER：离子液体离子源和纳米制造

• 批准号: 1162182
• 负责人: Paulo Lozano
• 金额: $ 12.94万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-06-01 至 2014-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1162182&HistoricalAwards=false
• 关键词: EAGER; Ionic; Liquid; Ion; Sources

The objective of this EArly-Grant for Exploratory Research (EAGER) project is to study the fundamental science and engineering of nano-ion emitters based on room temperature molten salts (ionic liquids - ILs). The context of this project is related to applications in nanomanufacturing, space propulsion and other fields. It is possible with ionic liquid ion sources (ILIS) to field-evaporate nearly monochromatic positive or negative ion beams from a virtual point. These characteristics are ideal for applications at the nano-scale as these ions potentially can be focused to sizes commensurate with the source, which according to recent estimates is a few nm. In addition, the high efficiency and brightness enables micro and nanoengineered propulsion devices for very small satellites (0.1-10 kg). Many of these ions are chemically reactive, in principle enhancing etching rates without recurring to chemical assistance in wafer processing applications. With the vast number of available ILs it should be possible to tailor ion beam composition to specific applications. The main goal is to improve our understanding of ILIS sources through theory and experiment. Particular attention will be given to (1) the determination of the focusability of ion beams, (2) their reactive etching characteristics and other interactions with materials, (3) their potential for nanomanufacture in dense arrays for high throughput and (4) contribute to the theory of molecular ion emission. The research objectives and methods are centered around a series of challenges and missing knowledge described in this proposal. The uniqueness and novelty of ionic liquid ion sources open up a number of relevant research avenues, ranging from the design of the source and its implementation in arrays to the theory of molecular ion evaporation and the interaction of ions with materials. Few advances in field evaporation ion sources have been made beyond the invention of the liquid metal ion source more than 30 years ago. The introduction of ILIS has the potential to revitalize the field and is expected that important scientific and engineering contributions will result from NSF support in this new area.It is anticipated that ILIS sources will have relevant impact on industrial applications, such as nanomanufacturing, ion microscopy, lithography and implantation on a variety of solid-state materials, and in propulsion applications for small satellites. It is also expected that relevant collaborations will emerge as research results are documented in scientific journals. This research will have an important impact on the educational curriculum of undergraduate and graduate students enrolled in interdisciplinary programs at MIT. In addition, this NSF support will be pivotal in continuing involvement in outreach programs, such as MIT's Summer Research Program (MSRP), which supports education in science and engineering of under-represented groups and the Undergraduate Research Opportunities Program (UROP). Coordinated outreach activities will be organized with local educators and research institutions at all levels, inviting them to participate with their students in laboratory demonstrations, lectures and other scientific activities with the objective of encouraging young students to pursue an education in science, technology, engineering and mathematics.

探索性研究（急切）项目的这一早期授予的目的是研究基于室温熔融盐（离子液体-ILS）的纳米离子发射器的基础科学和工程。该项目的背景与纳米制造，太空推进和其他领域的应用有关。离子液体离子源（ILIS）可能从虚拟点脱离现场蒸发几乎是单色的阳性或负离子束。这些特征对于在纳米级应用中的应用是理想的选择，因为这些离子可能会集中在与来源相称的大小上，根据最近的估计，这是几个NM。此外，高效率和亮度可为非常小的卫星（0.1-10 kg）提供微工程推进装置。这些离子中的许多具有化学反应性，原则上提高了蚀刻速率，而无需在晶圆加工应用中反复出现化学援助。有了大量可用的IL，应该可以根据特定应用调整离子束组成。 主要目标是通过理论和实验来提高我们对ILIS来源的理解。 （1）确定离子束的聚焦性，（2）它们的反应性蚀刻特性和与材料的其他相互作用，（3）它们在高吞吐量的密集阵列中的潜力和（4）有助于分子离子发射理论。研究目标和方法集中在本提案中描述的一系列挑战和缺失知识上。 离子液体离子源的独特性和新颖性开辟了许多相关的研究途径，从源的设计及其在阵列中的实现到分子离子蒸发理论以及离子与材料的相互作用。在30年前，除了液态金属离子源的发明之外，现场蒸发离子源的进展很少。 ILIS的引入有可能振兴该领域，并期望重要的科学和工程贡献将由NSF在这个新领域的支持产生。预计ILIS来源将对工业应用产生相关的影响，例如纳米制造，离子显微镜，晶格，光刻，光刻术和对各种固体材料的植入和植入各种固体材料以及对小型卫星的应用。还可以预期，随着科学期刊中的研究结果记录，相关的合作将出现。这项研究将对麻省理工学院跨学科课程的本科生和研究生的教育课程产生重要影响。 此外，这种NSF支持将是继续参与外展计划的关键，例如MIT的夏季研究计划（MSRP），该计划支持代表不足的小组的科学和工程教育以及本科研究机会计划（UROP）。协调的外展活动将与当地的教育工作者和各级研究机构组织，邀请他们与学生一起参加实验室示范，讲座和其他科学活动，目的是鼓励年轻学生从事科学，技术，工程和数学的教育。