STTR Phase II: High Performance Piezoelectric MEMS Microphones

STTR 第二阶段：高性能压电 MEMS 麦克风

• 批准号: 1127487
• 负责人: Robert Littrell
• 金额: $ 49.64万
• 依托单位: Baker-Calling
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-15 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1127487&HistoricalAwards=false
• 关键词: STTR; Phase; II; Performance; Piezoelectric

This Small Business Technology Transfer (STTR) Phase II project will develop a microphone for the test and measurement (T&M) market that utilizes piezoelectric microelectromechanical systems (MEMS) technology. During Phase I of this project, feasibility was demonstrated by building and testing a microphone with the necessary performance for this market. Specifically, this microphone has a noise floor that is 10 times lower than any piezoelectric MEMS microphone previously demonstrated. The unique device modeling and optimization that allowed for this significant performance improvement enables a new class of microphones. During Phase II of this project, the commercialization effort will be accelerated by partnering with a production foundry to develop a fabrication process, enabling the mass fabrication of these parts. Successful completion of this task requires the repeatable fabrication in a production foundry with yield exceeding 90%. This Phase II project also seeks to further develop self-calibration capabilities, building on a unique aspect of these microphones demonstrated during Phase I. Successful completion of this task will result in a microphone capable of determining its own sensitivity to within 1 dB of that determined by standard calibration methods.The broader impact/commercial potential of this project is significant due to the widespread use of microphones in today's markets. This microphone?s unique combination of device simplicity and high performance enables a new class of microphones that fills the gap between extremely low-cost microphones used in consumer electronics applications and extremely high-cost microphones used in laboratories and test facilities. Through discussions with manufacturers and end-users of microphones and related systems, the company have determined that a wide range of applications would benefit from such a device. These microphones will significantly reduce the cost of complex T&M systems such as arrays that can cost more than $1M and improve the accuracy of equipment used by noise control engineers, work safety inspectors, police officers, and many others. Further, this microphone technology not only has the potential to impact the T&M market, but provides advantages for the hearing aid and consumer electronics markets as well. The total addressable market for this technology is more than $2.5B.

这个小型企业技术转移（STTR）II期项目将开发用于利用压电微电动机电系统（MEMS）技术的测试和测量（T＆M）市场的麦克风。 在该项目的第一阶段中，通过构建和测试麦克风具有必要性能的麦克风来证明可行性。 具体而言，该麦克风的噪声地板比以前证明的任何压电磁极麦克风低10倍。 允许这种重大性能改进的独特设备建模和优化可实现新的麦克风。 在该项目的第二阶段期间，商业化工作将通过与生产铸造厂合作开发制造过程，从而加速商业化工作，从而实现这些零件的大规模制造。 成功完成此任务需要在产量超过90％的生产铸造中进行可重复的制造。 该第二阶段项目还旨在进一步发展自我校准能力，建立在第一阶段的这些麦克风的独特方面。成功完成这项任务将导致麦克风能够确定其对标准校准方法确定的敏感性的敏感性。由于该项目的更广泛的影响/商业潜力，因此由于对麦克风的广泛使用而产生了更大的影响/商业潜力。 这种麦克风的独特组合设备简单性和高性能使一类新的麦克风填补了用于消费电子应用中使用的极低成本麦克风之间的差距，以及在实验室和测试设施中使用的极高成本麦克风。 通过与麦克风及相关系统的制造商和最终用户的讨论，该公司确定广泛的应用程序将从这种设备中受益。 这些麦克风将大大降低复杂的T＆M系统的成本，例如阵列的成本超过100万美元，并提高噪声控制工程师，工作安全检查员，警察和许多其他许多设备的准确性。 此外，这种麦克风技术不仅有可能影响T＆M市场，而且还为助听器和消费电子市场提供了优势。 该技术的总可寻址市场超过$ 2.5B。