Surface Plasmon Photoacoustic Imaging of Subsurface Objects

地下物体的表面等离子体光声成像

• 批准号: 1031574
• 负责人: Oluwaseyi Balogun
• 金额: $ 27万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1031574&HistoricalAwards=false
• 关键词: Surface; Plasmon; Photoacoustic; Imaging; Subsurface

This project seeks to develop a novel photoacoustic (PA) microscopy system that would enable the mapping of deeply buried subsurface defects in optically opaque materials. Imaging of subsurface objects with sub-100 nm dimensions in opaque materials remains a major concern to integrated circuit reliability and performance. PA techniques combine the benefits of the large penetration depth of ultrasound with the lateral spatial resolution of an optical probe. However, the spatial resolution of PA techniques is limited by diffraction. To overcome these challenges, a novel approach is proposed for sub-wavelength PA technology by creating highly localized optical and ultrasound fields using: a) surface plasmonc nano-focusing for sub-100 nm confinement of the optical probe for high sensitivity detection of laser generated high frequency (0.5 - 10 GHz) ultrasound, and b) time reversal acoustics for spatial focusing of the scattered ultrasound field from nanoscale sub-surface objects. This PA system would provide an unprecedented spatial resolution and penetration depth for imaging sub-surface defects in microelectronic devices. The educational and out-reach programs proposed are deigned to excite high school level students to pursue careers in STEM and provide unique multidisciplinary training opportunities for graduate and undergraduate students in the area of photoacoustic imaging.

该项目旨在开发一种新型的光声（PA）显微镜系统，该系统将在光学上不透明的材料中绘制深埋地下缺陷的映射。不透明材料中具有低100 nm尺寸的地下对象的成像仍然是集成电路可靠性和性能的主要关注点。 PA技术结合了超声的大渗透深度与光学探针的外侧空间分辨率相结合。 但是，PA技术的空间分辨率受衍射的限制。为了克服这些挑战，通过以下方式创建高度局部的光学和超声领域，提出了一种新颖的方法，使用以下方式：a）Surface Plasmonc纳米纳米纳米纳米纳米纳米纳米量，以下光学探针以高灵敏度检测到激光产生的高频（0.5-10 GHz）超级频率（0.5-10 GHz）超级脉冲的超敏感性，以及散布的超时性，以实现超时性的分散时间。纳米级子表面对象。该PA系统将提供空前的空间分辨率和渗透深度，以用于微电器设备中的地下缺陷。提议的教育和外部课程被裁定为激发高中生从事STEM的职业，并为光声成像领域的研究生和本科生提供独特的多学科培训机会。