Nanoelectromechanical uncooled infrared sensor using epitaxial graphene

使用外延石墨烯的纳米机电非制冷红外传感器

• 批准号: 1029346
• 负责人: Goutam Koley
• 金额: $ 36万
• 依托单位: University South Carolina Research Foundation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-08-15 至 2014-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1029346&HistoricalAwards=false
• 关键词: Nanoelectromechanical; uncooled; infrared; sensor; using

Nanoelectromechanical uncooled infrared sensor using epitaxial grapheneThe objective of this research is to develop a highly sensitive uncooled Infrared (IR) sensor using polymer/epitaxial few layer graphene (FLG) composite film as a novel sensing element, utilizing the extraordinary material properties of epitaxial FLG films on SiC. The approach is based on: (i) Designing polymer/FLG sensor through modeling and finite element simulations, (ii) Growing FLG films on doped 6H-SiC substrate, (iii) Fabrication and characterization of the polymer/FLG sensor layer, and (iv) Evaluation of the sensor for IR detection. Intellectual Merit: Success of the proposed research will lead to the development of a novel uncooled and inexpensive IR sensor that can far exceed the state-of-the-art performance of uncooled IR sensors, and rival those utilizing cryogenic cooling. The sensor would offer very high sensitivity along with very short response time, addressing the critical limitations of other uncooled IR sensors that suffer from high noise floor, high thermal time constant, and dependence on optical transduction. The highly sensitive deflection transduction method utilizing substrate gating, can also foster the development of next generation nanoelectromechanical devices based on suspended graphene. Broader Impacts: The project is expected to have broad technological impacts in the areas of defense, homeland security, astronomy, law enforcement, and environmental monitoring. For educational and outreach activities, the PIs would involve one undergraduate and one high school student every year in their research, ensuring one minority student participation. The PIs would also develop a graduate course, and disseminate research results through conference participation, and utilizing individual research group, and departmental websites.

该研究的纳米电机机电非干燥的红外传感器是使用聚合物/外延少量层石墨烯（FLG）复合膜作为一种新型传感元件，使用同型FLG Films on s sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic sic siC，使用聚合物/外延的少数层石墨烯（FLG）复合膜作为新型传感元素开发高度敏感的非敏感的红外线（IR）传感器。该方法基于：（i）通过建模和有限元模拟设计聚合物/FLG传感器，（ii）在掺杂的6H-SIC底物上生长的FLG膜，（iii）聚合物/FLG传感器层的制造和表征，以及（iv）对IR检测的传感器评估。智力优点：拟议的研究的成功将导致一种新型的不冷和廉价的IR传感器的发展，该传感器可能远远超过了未冷却的IR传感器的最新性能，并与使用低温冷却的人相媲美。该传感器将提供很高的灵敏度以及非常短的响应时间，并解决了其他未冷却的IR传感器的临界局限性，这些传感器具有高噪声地板，高热时间常数以及对光学传输的依赖。利用底物门控的高度敏感的挠度转导方法也可以促进基于悬浮石墨烯的下一代纳米电机力学设备的开发。更广泛的影响：预计该项目将对国防，国土安全，天文学，执法和环境监测领域产生广泛的技术影响。对于教育和宣传活动，PIS每年将涉及一名本科生和一名高中生的研究，以确保一个少数学生的参与。 PI还将开发研究生课程，并通过会议参与以及利用个人研究小组和部门网站来传播研究结果。