Resonant Nano Electro Mechanical Systems adapted for Sensing

适用于传感的谐振纳米机电系统

• 批准号: 1001742
• 负责人: Jeevak Parpia
• 金额: $ 39万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2013-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1001742&HistoricalAwards=false
• 关键词: Resonant; Nano; Electro; Mechanical; Systems

Project SummaryObjectives: In this proposal we will provide the enabling science and technical underpinnings that will move sensing with N/MEMS beyond the realm of a scientific curiosity. We will investigate the dissipation of diverse resonant N/MEMS operating in air, leading to optimized performance in air, the carrier gas from which analytes will be sensed. We will also enable and demonstrate sensing of volatile organics.The intellectual merit rests on our three pronged approach: 1. To reduce radiated sound energy that damps the motion of resonators in air, making the resonant frequency shift a more sensitive transduction mechanism. 2. To investigate tensile stress to increase the Q in polysilicon and other low loss materials and also expose the origin of the enhancement of Q by stress. 3. To explore stress-based sensing where an analyte in the air induces a change in stress in a functionalizing coating on a surface The broader impacts for the proposed research extend to high Q systems under investigation for quantum computation as mechanical qubits (the Q providing a high fidelity). Our research will enable diverse sensing functions for security and threat recognition from chemical and biological agents. Other benefits will flow from our planned REU and K-12 initiatives. The integration of undergraduates in aspects of the research and links to applications will benefit a broad spectrum of junior scientists, and equip them with practical problem-solving knowledge that extends beyond the classroom or laboratory environment.

项目摘要：在此提案中，我们将提供具有促成科学和技术基础的能力，这些基础将使N/MEM的感知超出科学好奇心的范围。我们将研究在空气中运行的各种共振N/MEM的耗散，从而在空气中进行优化的性能，即将感受分析物的载气。我们还将启用并展示传感挥发性有机物的感应。智力优点取决于我们的三种统治方法：1。减少辐射的声能，从而抑制空气中的谐振器的运动，从而使谐振频率转移更敏感的转导机制。 2。研究拉伸应力以增加多硅和其他低损失材料的Q，并揭示压力增强Q的起源。 3。为了探索基于压力的传感，空气中的分析物在表面上诱导官能化涂层的压力变化，对拟议研究的更广泛的影响扩展到正在研究的高Q系统，以作为机械量子量计（Q提供高忠诚度）。我们的研究将使化学和生物学剂的安全和威胁识别能够实现多种感测功能。我们计划中的REU和K-12计划还将获得其他好处。本科生在研究方面的整合以及与应用程序的联系将使广泛的初级科学家受益，并为他们提供实用的解决问题的知识，这些知识超出了课堂或实验室环境。