Resonant Nano Electro Mechanical Systems adapted for Sensing

适用于传感的谐振纳米机电系统

• 批准号: 1001742
• 负责人: Jeevak Parpia
• 金额: $ 39万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2013-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1001742&HistoricalAwards=false
• 关键词: Resonant; Nano; Electro; Mechanical; Systems

Project SummaryObjectives: In this proposal we will provide the enabling science and technical underpinnings that will move sensing with N/MEMS beyond the realm of a scientific curiosity. We will investigate the dissipation of diverse resonant N/MEMS operating in air, leading to optimized performance in air, the carrier gas from which analytes will be sensed. We will also enable and demonstrate sensing of volatile organics.The intellectual merit rests on our three pronged approach: 1. To reduce radiated sound energy that damps the motion of resonators in air, making the resonant frequency shift a more sensitive transduction mechanism. 2. To investigate tensile stress to increase the Q in polysilicon and other low loss materials and also expose the origin of the enhancement of Q by stress. 3. To explore stress-based sensing where an analyte in the air induces a change in stress in a functionalizing coating on a surface The broader impacts for the proposed research extend to high Q systems under investigation for quantum computation as mechanical qubits (the Q providing a high fidelity). Our research will enable diverse sensing functions for security and threat recognition from chemical and biological agents. Other benefits will flow from our planned REU and K-12 initiatives. The integration of undergraduates in aspects of the research and links to applications will benefit a broad spectrum of junior scientists, and equip them with practical problem-solving knowledge that extends beyond the classroom or laboratory environment.

项目摘要目标：在本提案中，我们将提供使 N/MEMS 传感超越科学好奇心领域的科学和技术基础。我们将研究在空气中运行的各种谐振 N/MEMS 的耗散，从而优化空气（从其中感测分析物的载气）中的性能。我们还将实现并演示挥发性有机物的传感。我们的智力优势取决于我们的三管齐下的方法： 1. 减少辐射声能，从而抑制空气中谐振器的运动，使谐振频移成为更灵敏的转换机制。 2. 研究拉应力提高多晶硅和其他低损耗材料的 Q 值，并揭示应力提高 Q 值的根源。 3. 探索基于应力的传感，其中空气中的分析物会引起表面功能化涂层的应力变化。拟议研究的更广泛影响延伸到正在研究的高 Q 系统，用于作为机械量子位的量子计算（Q 提供高保真度）。我们的研究将为化学和生物制剂的安全和威胁识别提供多种传感功能。我们计划的 REU 和 K-12 计划将带来其他好处。本科生在研究方面的整合以及与应用的联系将使广泛的初级科学家受益，并为他们提供超越课堂或实验室环境的实际解决问题的知识。