MRI-R2: Acquisition of a Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) for Nano/Micro Fabrication/Characterization

MRI-R2：采集聚焦离子束 - 扫描电子显微镜 (FIB-SEM)，用于纳米/微米制造/表征

• 批准号: 0960022
• 负责人: Xingwei Wang
• 金额: $ 115万
• 依托单位: University of Massachusetts Lowell
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-08-01 至 2013-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0960022&HistoricalAwards=false
• 关键词: MRI; R2; Acquisition; Focused; Ion

Abstract"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)" University of Massachusetts at Lowell (UML) requests support for the acquisition of a state-of-the-art Auriga CrossBeam Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) workstation from Carl Zeiss for research and research training that are critical for workforce training and regional economic development.Intellectual Merit: Complemented with existing extensive resources, the FIB-SEM can simultaneously perform machining and characterization of both conductive and nonconductive materials with best-in-class resolution. It will enable in-depth, fundamental research and position UML among the leaders in nanomanufacturing and plastics engineering research. While a few ongoing research projects will benefit from the requested system, several new programs that have been hindered by this lacking capability will be initiated. In addition, the acquisition will strengthen UML?s fast-growing research areas in nanomedicine, biomedical devices, and bioengineering. Last but not the least, collaborations with nearby universities and local companies will be enhanced. Examples include tooling for cost-effective nanomanufacturing systems, high speed AFM tip arrays for high-rate nanomanufacturing, and nanoparticle drug delivery systems.Broader Impacts: The requested equipment will immediately impact research by more than 20 faculty members from nine departments. Graduate, undergraduate, and K-12 students as well as industry professionals will benefit from programs incorporating the FIB system. A unique "machining" program will be piloted with the Nashoba Valley Technical High School and extended to local technical high schools. In addition, UML has long-standing ties with industry and flexible arrangements for equipment use.

摘要“该奖项根据 2009 年美国复苏和再投资法案（公法 111-5）提供资金”马萨诸塞大学洛厄尔分校 (UML) 请求支持购买最先进的 Auriga CrossBeam 聚焦离子束- Carl Zeiss 的扫描电子显微镜 (FIB-SEM) 工作站，用于研究和研究培训，这对于劳动力培训和区域经济发展至关重要。智力优势：补充借助现有的广泛资源，FIB-SEM 可以以一流的分辨率同时对导电和非导电材料进行加工和表征。它将促进深入的基础研究，并使 UML 跻身纳米制造和塑料工程研究领域的领导者之列。虽然一些正在进行的研究项目将从所请求的系统中受益，但一些因缺乏能力而受到阻碍的新项目将会启动。此外，此次收购还将加强 UML 在纳米医学、生物医学设备和生物工程方面快速发展的研究领域。最后但并非最不重要的一点是，与附近大学和当地公司的合作将得到加强。例如，用于经济高效的纳米制造系统的工具、用于高速纳米制造的高速 AFM 尖端阵列以及纳米颗粒药物输送系统。 更广泛的影响：所需的设备将立即影响来自 9 个系的 20 多名教职员工的研究。研究生、本科生和 K-12 学生以及行业专业人士将受益于包含 FIB 系统的课程。一项独特的“机械加工”计划将在纳肖巴谷技术高中进行试点，并扩展到当地的技术高中。此外，UML与业界有着长期的联系，对设备的使用有灵活的安排。