Development of Scanning Near Field Ultrasound Holography with Integrated Electronic Detection for Sub-Surface Nanomechanical Imaging

用于亚表面纳米机械成像的集成电子检测扫描近场超声全息术的发展

• 批准号: 0925882
• 负责人: Vinayak Dravid
• 金额: $ 34.11万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0925882&HistoricalAwards=false
• 关键词: Development; Scanning; Near; Field; Ultrasound; Development; Scanning; Near; Field; Ultrasound

NSF ECCS-0925882A large number of modern physical and biological structures and devices require tools and techniques to see below surfaces, non-destructively and with nanoscale resolution. With respect to "non-destructive" real-space imaging, there is a clear void between the two ranges of length-scales offered by confocal / photon or acoustic/sonography techniques (micrometer scale) and SPM (nano- and sub-nanometer scale). This is particularly true if features of interest are buried deeper into the material, beyond the interaction range of proximal probes. The project concerns development of a Scanning Near field ultrasound holography (SNFUH) with integrated electronic feedback and actuation system for imaging buried nanostrucures and pattern recognition.The Intellectual Merit of the project addresses many unmet needs for sub-surface imaging tool-set. The project research comprises an innovative combination of micro-electro-mechanical systems (MEMS) approach, scanning probe microscopy (SPM), acoustic holography integrated with all-electronic feedback approach; to enable massively parallel metal-oxide semiconductor field-effect transistor (MOSFET) embedded microcantilever platform for rapid turn-key imaging tool-set. By combining the nanometer-scale spatial resolution of conventional SPMs with the elastic imaging capabilities of acoustic or ultrasonic microscopes, the electronic detection SNFUH project is expected to fill the critical need in characterizing and investigating the static and dynamic mechanics of nanoscale systems. The Broader Impact of the project promises to open new vistas in non-destructive high resolution microscopy for imaging buried nanostructures, defects, delaminations and sub-surface pattern recognition in semiconducting materials and devices. The education plan focuses on (1) development of a teaching module in nanomechanics of soft and structures which includes hand-on-laboratory demo and classroom tutorials; (2) Undergraduate and RET (research experience for teachers) individual project modules correlated with research goals. The educational objectives will be achieved by (a) providing hand-on, team experience to promote active and collaborative learning; (b) exposing promising students at the undergraduate level to research opportunities in emerging field of nanomechanics, and (iii) to recruit and retain traditionally under-represented students though MIN (Minority Internships in Nanotechnology) programs which provide opportunities for undergraduates to participate in hands-on research in the area of nanotechnology. Collectively, the project will attempt to address the unmet technology requirements for imaging buried defects/structures in nationally critical important fields of emerging nano-electronics and nano-bio-electronics. The project is also expected to positively impact educational and training needs; by providing diverse educational and societal outreach initiatives for American students; with a particular focus on underrepresented groups.

NSF ECCS-0925882A大量的现代物理和生物结构和设备都需要工具和技术，可以在下面的表面，并通过纳米级分辨率来看。关于“非破坏性”的真实空间成像，在共焦 /光子或声学 /声学技术（微米尺度）提供的两个长度尺度之间存在明显的空隙，而SPM（纳米和亚纳米计尺度）。 如果将感兴趣的特征深入到材料中，则尤其如此，超出了近端探针的相互作用范围。 该项目涉及扫描近距离超声全息图（SNFUH）的开发，该扫描具有集成的电子反馈和驱动系统，用于成像掩埋纳米结构和模式识别。该项目研究包括微机械系统（MEMS）方法，扫描探针显微镜（SPM）的创新组合，与全电子反馈方法集成的原声全息图；为了实现大规模平行的金属氧化物半导体场效应晶体管（MOSFET）嵌入的微型管理器平台，以快速交钥匙成像工具集。通过将常规SPM的纳米尺度空间分辨率与声学或超声显微镜的弹性成像能力相结合，预计电子检测SNFUH项目将满足表征和研究纳米级系统静态和动态力学的关键需求。该项目的更广泛的影响有望在非毁灭性高分辨率显微镜中开放新的远景，以成像掩埋纳米结构，缺陷，分层和半导体材料和设备中的地下图案识别。教育计划的重点是（1）在软结构和结构的纳米力学中开发教学模块，其中包括手工实验室的演示和课堂教程； （2）本科和RET（教师研究经验）单个项目模块与研究目标相关。教育目标将通过（a）提供手工，团队经验来促进积极和协作学习； （b）将有前途的学生接触到新兴领域的纳米力学领域的研究机会，（iii）招募和保留传统上代表性不足的学生，尽管有时（纳米技术的少数族裔实习）计划为本科生提供了在纳米技术领域中进行动手研究的机会。 总的来说，该项目将试图解决新兴纳米电子和纳米生物电子学的全国关键重要领域中掩埋的缺陷/结构的未满足技术要求。预计该项目将对教育和培训需求产生积极影响；通过为美国学生提供多种教育和社会外展计划；特别关注代表性不足的群体。