STTR PHASE I: Application of an Electrostatic Actuator Stable-Range-of-Motion Enhancement Control Law to Improve MEMS Gyroscopic Sensors

STTR 第一阶段：应用静电执行器稳定运动范围增强控制律来改进 MEMS 陀螺仪传感器

• 批准号: 0741195
• 负责人: Samuel French
• 金额: $ 14.99万
• 依托单位: MEMSense, LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0741195&HistoricalAwards=false
• 关键词: STTR; PHASE; Application; Electrostatic; Actuator

This STTR Phase I research project will seek to significantly reduce the size and cost of MEMS gyroscopes through improving the internal electrostatic actuators. Specifically, this effort will commercialize Auburn University's patent protected technique for extending the stable range of motion of micromachined gap-closing actuators, so that the actuator size can be reduced while still producing the same range of motion. This technique not only increases the actuator's stable range of motion, it also allows for a denser architecture, further reducing actuator size. Auburn University will utilize its expertise and facilities to characterize and optimize the proposed technique. The scientific merit of this effort also includes the development of a sensorless technique for increasing the stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators that can be applied to many types of MEMS devices in addition to gyroscopes.A limitation of many types of MEMS devices has been the limited stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators, with applications such as variable capacitors, micro mirror based spatial light modulators and precision inertial sensors that utilize actuators. Most techniques developed to alleviate this problem either involve expensive changes to the physical design or complex motion sensor based controller approaches. This research can lead to new MEMS products, the application of existing MEMS products to new applications, and an enhanced understanding of the capabilities and limitations of micromachined devices.

该STTR I期研究项目将通过改善内部静电执行器来大大降低MEMS陀螺仪的大小和成本。具体而言，这项工作将使奥本大学的专利保护技术商业化，以扩展微机械插入间隙执行器的稳定运动范围，以便可以减小执行器的大小，同时仍会产生相同的运动范围。该技术不仅增加了执行器的稳定运动范围，还允许更密集的体系结构，进一步降低执行器的大小。奥本大学将利用其专业知识和设施来表征和优化所提出的技术。这项工作的科学优点还包括开发一种无传感器技术，以增加微机械静电平行板的稳定运动范围以及可用于多种类型的MEMS设备的稳定运动，除陀螺仪外，许多类型的MEMS设备的局限性是限制的，这些限制是限制的，是电动板的稳定型号，这些板的稳定性是电动板的稳定范围，并且是型号的电气稳定范围。电容器，基于微镜的空间光调节器和使用执行器的精确惯性传感器。大多数用于缓解此问题的技术涉及对物理设计的昂贵变化，或者基于复杂的运动传感器控制器方法。这项研究可以导致新的MEMS产品，现有MEMS产品在新应用程序中的应用以及对微机械设备的功能和局限性的增强。