FRG: Piezoelectric Micromachined Transducers using Epitaxial PMN-PT Films on Silicon for Medical Ultrasound

FRG：使用硅上外延 PMN-PT 薄膜进行医疗超声的压电微机械传感器

• 批准号: 0313764
• 负责人: Chang-Beom Eom
• 金额: $ 82.5万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0313764&HistoricalAwards=false
• 关键词: FRG; Piezoelectric; Micromachined; Transducers; using

This FRG (focused research group) project addresses materials science and biomedical engineering issues in research on new generation, high performance pMUT (piezoelectric micromachined ultrasound transducer) arrays using Pb(Mg1/3Nb2/3)-PbTiO3 (PMN-PT) heterostructures on silicon for real-time 3-D medical ultrasound imaging. The aim is for more sensitive, broader bandwidth, less expensive transducer arrays compared with conventional technologies. The approach is to gain understanding of phenomena governing electromechanical coupling in epitaxial piezoelectric films in pMUT device structures, and to achieve epitaxial piezoelectric heterostructure fabrication directly on silicon with superior piezoelectric response. By integrating PMN-PT films with silicon, use is made of well-developed device fabrication processes for patterning/micromachining of silicon, the availability of large-area substrates, and integration with high performance electronic circuits. Research activities include: (1) growth of epitaxial SrRuO3 conductive oxide bottom electrodes directly on silicon by MBE; (2) growth of epitaxial piezoelectric PMN-PT films by sputtering; (3) macroscale and nanoscale characterization of the electromechanical properties of PMN-PT films; (4) examination of the microstructure and interface atomic structure of pMUT devices using high resolution transmission electron microscopy and analytical electron microscopy at locations defined by focused ion beam etching; (5) design and fabrication of pMUT arrays using epitaxial PMN-PT heterostructures on silicon; and (6) evaluation of the pMUT for medical ultrasound imaging using the Duke University real-time ultrasound scanner. The required expertise is assembled in a multidisciplinary team with members working in materials science and biomedical engineering. %%% Education and outreach efforts are integrated into the research program, introducing graduate students to modern, multidisciplinary science and technology through use of sophisticated research instrumentation, and research interactions and approaches across disciplines. Undergraduate students will also be involved with laboratory research activities. Additionally, direct interaction with high school students and science teachers is a part of the project. High school teachers will participate in a summer laboratory research experience at U. Wisconsin and Argonne National Laboratory. This research experience will be coordinated with an existing curriculum-development program, in order to integrate it into the high-school curriculum. The project is co-supported by the MPS/DMR/EM and ENG/BES/BME-RAPD Programs.***

这个FRG（重点研究小组）项目在新一代，高性能PMUT（PIEZOELECTRIC微加工超声传感器）阵列中的材料科学和生物医学工程问题介绍了使用PB（MG1/3NB2/3）-PBTIO3（PMN-PT）实时的硅膜上实时3-D-D-D-D Medical Ultrassound Medical Iltersound Image。与传统技术相比，其目的是使更敏感，更广泛的带宽，更便宜的传感器阵列。该方法是了解对PMUT设备结构中外延压电膜中控制机电耦合的现象，并直接在硅上，并在硅上实现超级压电响应直接在硅上的同育压电异质结构制造。通过将PMN-PT膜与硅整合在一起，使用良好的设备制造工艺制成，用于对硅的图案/微加工，大面积底物的可用性以及与高性能电子电路的集成。研究活动包括：（1）MBE直接在硅上直接在硅上的外延SRRUO3导电性氧化物底部电极的生长； （2）通过溅射的外延压电PMN-PT膜的生长； （3）PMN-PT膜的机电特性的宏观和纳米级表征； （4）使用高分辨率的透射电子显微镜和分析电子显微镜检查PMUT设备的显微结构和界面原子结构，该位置由聚焦离子束蚀刻所定义的位置； （5）使用硅上的外延PMN-PT异质结构设计和制造PMUT阵列； （6）使用杜克大学实时超声扫描仪对PMUT进行医学超声成像的评估。所需的专业知识是在一个多学科团队中组装的，成员在材料科学和生物医学工程领域工作。 %% %%教育和推广工作被整合到研究计划中，通过使用复杂的研究工具以及跨学科的研究互动和方法，将研究生介绍给现代，多学科的科学和技术。本科生还将参与实验室研究活动。此外，与高中生和科学老师的直接互动是该项目的一部分。高中教师将参加美国威斯康星州和阿根纳国家实验室的暑期实验室研究经验。这项研究经验将与现有的课程开发计划协调，以便将其集成到高中课程中。该项目由MPS/DMR/EM和Eng/BES/BME-RAPD程序共同支持***