NIRT: Science and Technology of Ultrananocrystalline Diamond Films for Multifunctional MEMS/NEMS Devices

NIRT：用于多功能 MEMS/NEMS 器件的超纳米晶金刚石薄膜科学与技术

• 批准号: 0304472
• 负责人: Zhen Chen
• 金额: $ 130万
• 依托单位: University of Missouri-Columbia
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0304472&HistoricalAwards=false
• 关键词: NIRT; Science; Technology; Ultrananocrystalline; Diamond

NIRT: SCIENCE AND TECHNOLOGY OF ULTRANANOCRYSTALLINE DIAMOND FILMSFOR MULTIFUNCTIONAL MEMS/NEMS DEVICESThe objectives of this three-year NIRT project are to investigate microstructure-mechanical-electronic transport property relationships of a new multifunctional material designated as ultrananocrystalline diamond (UNCD), and to utilize this material in novel microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). While silicon has been the dominant material in the microelectronics revolution of the 20 th Century, carbon in its various forms, especially diamond, may be a dominant material in the 21 st Century; particularly, in the MEMS/NEMS revolution currently underway.New methods of chemical vapor deposition recently developed by this team make possible themanufacturing of the UNCD films that exhibit unique and outstanding properties such as high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited thin films, unique field electron-emission properties, a wide range of conductivity controlled by microstructure and doping, and highly conformal films, which are all crucial to the development of novel MEMS/NEMS applications. Through interdisciplinary efforts of the team members from Northwestern University (NU), University of Illinois at Chicago (UIC) and University of Missouri-Columbia (UMC), in collaboration with Argonne and Sandia National Laboratories (ANL and SNL), an integrated experimental, analytical and computational program is proposed here with the following main research topics:1. Scan probe microscopy approaches, including conductive atomic force microcopy and ultra high vacuum scanning tunneling microscopy/spectroscopy, for nanoscale characterization of surface structure and conductivity of UNCD films, that will enable the microstructure to be ascertained for films made with various dopings;2. Investigation of mechanical properties, such as Young's modulus, hardness, plasticity, and fracture, of UNCD with varying degrees of doping, at the microlevel using a recently developed membrane deflection experiment, and at the nanolevel by means of a novel MEMS loading device that can operate in-situ surface probe and electron microscopes; and3. Study of the relationship between nanostucture and electro-mechanical properties of UNCD films via modeling and simulation with combined molecular/continuum approaches.The above interdisciplinary research efforts would make an intellectual contribution to understanding the relationship between grain size-grain boundary chemistry and electro-mechanical properties of UNCD at the nanoscale. In particular, the atomic-scale information suitable to unraveling the electronic conduction mechanism in UNCD and the effect of its microstructure on this phenomenon will be obtained, which can be positively used to design MEMS/NEMS devices. In this regard, the following two applications will be developed in collaboration with national laboratories and industry:o Arrays of cantilevers with UNCD tips for conductive atomic force microscopy (AFM), ando MEMS switches/Nanoresonators made of conductive UNCD membranes for wireless communication and other electronic scanning applications.The educational part of this NIRT includes the following components, which could impact the multi-level teaching-learning process in nanoscale science and engineering: Outreach to educators from community colleges and high schools: Teaching materials will bedeveloped during a summer workshop in the area of micro and nano technologies. Research Experience for Graduate and Undergraduate Students: In collaboration with two other major programs at NU, NSF-NSEC and MRSEC, and with national laboratories, undergraduate participants will engage in full-time research for a nine-week period over the summer. In particular, coordinated tours to ANL and frequent group meetings will be made to allow for the interaction among graduate and undergraduate students involved in this NIRT program.

NIRT: SCIENCE AND TECHNOLOGY OF ULTRANANOCRYSTALLINE DIAMOND FILMSFOR MULTIFUNCTIONAL MEMS/NEMS DEVICESThe objectives of this three-year NIRT project are to investigate microstructure-mechanical-electronic transport property relationships of a new multifunctional material designated as ultrananocrystalline diamond (UNCD), and to utilize this material in novel microelectromechanical systems (MEMS) and纳米机电系统（NEMS）。尽管硅一直是20世纪微电子革命中的主要材料，但以各种形式，尤其是钻石，可能是21世纪的主要材料。 particularly, in the MEMS/NEMS revolution currently underway.New methods of chemical vapor deposition recently developed by this team make possible themanufacturing of the UNCD films that exhibit unique and outstanding properties such as high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited thin films, unique field electron-emission properties, a wide range of电导率由微结构和掺杂以及高度保形膜控制，这对于新型MEMS/NEM应用的发展至关重要。通过西北大学（NU），伊利诺伊大学芝加哥大学（UIC）和密苏里大学哥伦比亚大学（UMC）的团队成员的跨学科努力，与Argonne和Sandia国家实验室（ANL和SNL）合作，这是一项综合实验，分析和计算计划，与以下综合实验性，分析和计算计划有关。扫描探针显微镜方法，包括导电原子力显微镜和超高真空扫描隧道显微镜/光谱，用于纳米级表征表面结构的表征和UNCD膜的电导率，这将使微观结构能够确定用各种围吸蛋白制成的膜； 2。使用最近开发的膜偏转实验，以及在纳米级，通过可通过新型的MEMS装载设备在纳米级上进行机械性能，例如Young的模量，硬度，可塑性和骨折，具有不同程度的掺杂度的UNCD，在微观层上进行了研究。和3。研究UNCD膜通过建模和通过结合分子/连续方法进行模拟和模拟的纳米塑料与机电特性之间的关系的研究。上述跨学科研究工作将为理解Nansoscale UNCD的谷物大小元边界化学和电力机械特性之间的关系做出智力贡献。特别是，将获得适合于UNCD中电子传导机制及其微观结构对该现象的影响的原子尺度信息，该信息可用于设计MEMS/NEMS设备。在这方面，将与国家实验室和行业合作开发以下两项应用：o带有UNCD导电原子力显微镜（AFM）的悬臂阵列，Ando Mems切换/纳米孔子由导电UNCD膜制成的无线沟通和其他电子扫描应用程序。科学与工程学：向社区大学和高中的教育工作者提供宣传：教材将在微型和纳米技术领域的夏季研讨会上发育。研究生和本科生的研究经验：与NU，NSF-NSEC和MRSEC以及国家实验室的其他两个主要计划合作，本科参与者将在夏季进行为期9周的全日制研究。特别是，将进行ANL和频繁的小组会议的协调之旅，以允许参与此NIRT计划的研究生和本科生之间的互动。