NER: Debonding and Fracture of Ultra-Thin Films

NER：超薄膜的脱粘和断裂

• 批准号: 0303927
• 负责人: John Slattery
• 金额: $ 9.95万
• 依托单位: Texas A&M Engineering Experiment Station
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2005-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0303927&HistoricalAwards=false
• 关键词: NER; Debonding; Fracture; Ultra; Thin

AbstractDebonding and fracture of ultra-thin (2 to 20 nm) films deposited on substrates (such as silicon) is an important problem in the manufacture of micro-electronic components. Internal stresses are developed in the thin films during their deposition, because there is a molecular mismatch at the interface between the thin film and its substrate. These stresses can result in both debonding (separation of the thin film from the substrate) and fracture.Traditional studies of stress-deformation behavior involve large material samples. The resulting descriptions of behavior assume that the material extends to ``infinity'' (perhaps 50 nm) in all directions. But within the immediate neighborhood of a phase interface, the material is subjected to long-range intermolecular forces from the adjoining phase, and the observed material behavior is different.Proposed herein is a novel extension of continuum mechanics to the near molecular scale to treat nanoscale fracturing and debonding phenomena. This theory employs known bulk material behavior outside an interfacial region and corrects this bulk material description within the interfacial region through the introduction of a body force (mutual force) that accounts for the difference in intermolecular forces when a portion of the material is replaced by an adjoinging phase. It is conjectured that this theory can provide a means to incorporate nanoscale modeling at a crack tip into macroscale fracture problems in order to predict fracture initiation and propagation from first priciples without (or with minimal) empirical parameter fitting.

沉积在底物上（例如硅）上的超薄（2至20 nm）薄膜的摘要和骨折是微电子成分制造中的重要问题。 内部应力是在薄膜沉积过程中在其沉积过程中发展的，因为薄膜与其底物之间的界面处存在分子不匹配。 这些应力可能导致脱粘（将薄膜与底物分离）和断裂。对压力变形行为的传统研究涉及大型材料样品。 由此产生的行为描述假定材料在所有方向上都延伸至``无穷大'（也许是50 nm）。但是在相界面的直接邻域内，材料从相邻的相位受到远距离分子间力，并且观察到的材料行为不同。本文中的杂种是连续力学到近分子尺度的新型扩展，以治疗纳米级分裂和剥离现象。该理论采用界面区域以外的已知散装物质行为，并通过引入体力（相互力）来纠正界面区域内的大量物质描述，该体力（相互力）解释了一部分材料被相邻阶段取代时分子间力的差异。据推测，该理论可以提供一种将裂纹尖端上的纳米级建模纳入宏观骨折问题，以预测第一个priciples的断裂启动和传播，而没有（或具有最小）经验参数拟合。