Development, Characterization, and Application of Advanced Coatings for Improving the Reliability of MEMS/NEMS Devices

用于提高 MEMS/NEMS 器件可靠性的先进涂层的开发、表征和应用

• 批准号: 0301056
• 负责人: Bharat Bhushan
• 金额: --
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-04-15 至 2007-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0301056&HistoricalAwards=false
• 关键词: Development; Characterization; Application; Advanced; Coatings

Advanced coatings will be developed by molecular and atomic design and tailoring of self-assembled monolayers (SAMs), diamond like carbon films (DLC), and organic/inorganic bilayers (perfluoropolyethers or SAMs on DLC), which are expected to have enhanced functionalities and to greatly improve the reliability of MEMS/NEMS. Understanding of the relationship between micro/nanotribological and mechanical performance of DLC and SAMs and their atomic and molecular structures will be clarified. The microstructure of these coatings will be characterized by various techniques. Their micro/nanoscale tribological properties will be mainly characterized by atomic force microscopy (AFM) and a novel microtriboapparatus developed by our laboratory.The effect of length scale, velocity, relative humidity, and temperature on the performance will be investigated. The micro/nanoscale mechanical properties of advanced DLC coatings will be mainly studied using a nanoindenter and AFM based bending and fatigue tests. The relationship between the process, structure, and performance will be addressed in order to obtain superior performance coatings. Computer modeling of adhesion relevant for MEMS/NEMS will be performed, in which the contribution of meniscus formation, electrostatic, van der Waals forces, and solid bridging will be considered. Knowledge of optimum surface characteristics and advanced coatings will be applied to an industrial application to improve their reliability. The pixel failure mechanisms of digital micromirror devices (DMD) will be studied. Methods to minimize adhesion, stiction/friction and wear will be incorporated in DMD devices. (Two support letters from industry are attached.) This study is expected to be beneficial to both the MEMS/NEMS research and industry.An award would support two graduate students and partially support one postdoctoral researcher. This would provide an opportunity to recruit and fund a minority or woman. The PI and his department have made efforts to attract such students in recent years. The department regularly invites, and provides travel grants for, students, particularly women and minorities, from other schools to attract them for graduate studies. Undergraduate students would work on the project as well. Projects like these provide hands-on opportunities for undergraduate students in a high-tech lab. Past undergraduates in the PI's lab have actually coauthored articles for technical journals. This project will provide additional material for the PI's course on tribology and in soon-to-be-developed nanotribology courses.

先进涂层将通过分子和原子设计以及自组装单层（SAM）、类金刚石碳膜（DLC）和有机/无机双层（全氟聚醚或DLC上的SAM）的定制来开发，预计这些涂层将具有增强的功能和性能。大大提高MEMS/NEMS的可靠性。将阐明 DLC 和 SAM 的微/纳米摩擦学和机械性能及其原子和分子结构之间的关系。这些涂层的微观结构将通过各种技术来表征。它们的微/纳米尺度摩擦学性能将主要通过原子力显微镜（AFM）和我们实验室开发的新型微摩擦装置进行表征。将研究长度尺度、速度、相对湿度和温度对其性能的影响。先进 DLC 涂层的微/纳米级机械性能将主要使用纳米压痕仪和基于 AFM 的弯曲和疲劳测试进行研究。将解决工艺、结构和性能之间的关系，以获得性能优越的涂层。将执行与 MEMS/NEMS 相关的粘附计算机建模，其中将考虑弯月面形成、静电、范德华力和固体桥接的贡献。最佳表面特性和先进涂层的知识将应用于工业应用，以提高其可靠性。将研究数字微镜器件（DMD）的像素故障机制。 DMD 器件中将采用尽量减少粘附、静摩擦/摩擦和磨损的方法。 （附上两封来自业界的支持信。）这项研究预计将有益于 MEMS/NEMS 研究和行业。一项奖项将支持两名研究生并部分支持一名博士后研究员。这将提供招募和资助少数族裔或女性的机会。近年来，PI及其部门努力吸引此类学生。该部门定期邀请其他学校的学生，特别是女性和少数民族学生，并为其提供旅费补助，以吸引他们攻读研究生。本科生也将参与该项目。此类项目为本科生提供了在高科技实验室进行实践的机会。 PI 实验室过去的本科生实际上曾在技术期刊上共同撰写过文章。该项目将为 PI 的摩擦学课程和即将开发的纳米摩擦学课程提供额外的材料。