Manufacturing and Reliability of Three-Dimensional Micro-Mechanical Actuators

三维微机械执行器的制造和可靠性

• 批准号: 0115527
• 负责人: Michael Bryant
• 金额: $ 18.5万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-15 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0115527&HistoricalAwards=false
• 关键词: Manufacturing; Reliability; Three; Dimensional; Micro

This grant provides funding for the development of micro-actuators, e.g., micro-motor, dynamic micro-gas bearing micro-continuously-variable speed-reducers. Inasmuch as magnetic fields, difficult to contain, have limited micro-scale use, two electrostatic motor drive concepts will be developed: (1) Variable Capacitance Motor - Variable capacitance motor minimizes energy of electric field in an air gap field that can change geometry. Rotor electrodes seek positions relative to stator electrodes of least potential energy stored in the electric field of an air gap between the rotor and stator. (2) Induced Charge Motor - Induced charge motor is based on a concept of induced polarization of charges of material in the motor creating a secondary electric field which aligns in a primary field. This variant of drive is the electric field analogy to an induction motor. To avoid stiction, contact between surfaces in relative motion must be avoided as in bearings. Among other concepts, micro-gas-bearings will be developed. Micro-grooves built into the shaft part of the motor will pump air or gas and build-up films that keep the shaft from touching the bearing and housing. In order to avoid stiction for start-stop, the bearing housing will be suitable coated with a thin film lubricant. For the above, and other actuators, advanced science-based modeling methods will be developed for underpinning design.If successful, the results of this research will lead to new methods in the relatively new arena of manufacturing in the micro-scale of three-dimensional mechanical components needed for various actuators. In developing the methods, emphasis will be given to reliability in the use of components in actuators. Envisioned are applications of actuators in bio-medical, aerospace, as well as other consumer products for which micro-size is paramount. Of course the use of micro-size actuators has the additional advantage of being environmentally friendly.

该赠款为微型执行器的开发提供资金，例如微型电机、动态微型气体轴承微型无级变速减速器。 由于难以控制的磁场在微尺度上的使用受到限制，因此将开发两种静电电机驱动概念： (1) 可变电容电机 - 可变电容电机最大限度地减少可改变几何形状的气隙场中的电场能量。 转子电极寻找相对于定子电极而言存储在转子和定子之间的气隙的电场中的势能最少的位置。 (2) 感应充电电机 - 感应充电电机基于电机中材料电荷的感应极化概念，产生与初级磁场对齐的次级电场。 这种驱动方式类似于感应电机的电场。 为了避免静摩擦，必须避免相对运动的表面之间的接触，如轴承中那样。 除其他概念外，还将开发微型气体轴承。 电机轴部分内置的微槽将泵送空气或气体，并形成薄膜，防止轴接触轴承和外壳。 为了避免启停时的粘滞，轴承座上会适当涂上一层薄膜润滑剂。 对于上述和其他执行器，将开发先进的基于科学的建模方法来进行基础设计。如果成功，这项研究的结果将在三维微观尺度的相对较新的制造领域带来新的方法。各种执行器所需的机械部件。 在开发这些方法时，将重点关注执行器中组件使用的可靠性。预计执行器将应用于生物医学、航空航天以及其他微型尺寸至关重要的消费产品。 当然，使用微型执行器还有一个额外的优点，那就是环保。