Manufacturing and Reliability of Three-Dimensional Micro-Mechanical Actuators

三维微机械执行器的制造和可靠性

• 批准号: 0115527
• 负责人: Michael Bryant
• 金额: $ 18.5万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-15 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0115527&HistoricalAwards=false
• 关键词: Manufacturing; Reliability; Three; Dimensional; Micro

This grant provides funding for the development of micro-actuators, e.g., micro-motor, dynamic micro-gas bearing micro-continuously-variable speed-reducers. Inasmuch as magnetic fields, difficult to contain, have limited micro-scale use, two electrostatic motor drive concepts will be developed: (1) Variable Capacitance Motor - Variable capacitance motor minimizes energy of electric field in an air gap field that can change geometry. Rotor electrodes seek positions relative to stator electrodes of least potential energy stored in the electric field of an air gap between the rotor and stator. (2) Induced Charge Motor - Induced charge motor is based on a concept of induced polarization of charges of material in the motor creating a secondary electric field which aligns in a primary field. This variant of drive is the electric field analogy to an induction motor. To avoid stiction, contact between surfaces in relative motion must be avoided as in bearings. Among other concepts, micro-gas-bearings will be developed. Micro-grooves built into the shaft part of the motor will pump air or gas and build-up films that keep the shaft from touching the bearing and housing. In order to avoid stiction for start-stop, the bearing housing will be suitable coated with a thin film lubricant. For the above, and other actuators, advanced science-based modeling methods will be developed for underpinning design.If successful, the results of this research will lead to new methods in the relatively new arena of manufacturing in the micro-scale of three-dimensional mechanical components needed for various actuators. In developing the methods, emphasis will be given to reliability in the use of components in actuators. Envisioned are applications of actuators in bio-medical, aerospace, as well as other consumer products for which micro-size is paramount. Of course the use of micro-size actuators has the additional advantage of being environmentally friendly.

该赠款为微型演员的开发提供了资金，例如微型运动，动态微气体带有微型可变速度降低速度降低器。 作为难以包含的磁场，将开发两个静电运动驱动器概念：（1）可变电容电动机 - 可变电容电动机最大程度地减少了可以改变几何形状的空气间隙场中电场的能量。 转子电极寻求相对于转子和定子之间气隙的电场中的最小势能的定子电极的位置。 （2）诱导的电荷电动机 - 诱导电荷电动机基于诱导电动机电荷极化的概念，从而产生了在主要场中对齐的二级电场。 驱动器的这种变体是电场与感应电动机的类比。 为避免截然，必须像轴承一样避免相对运动中的表面之间接触。 除其他概念外，还将开发微气体。 电动机轴部分内置的微型山顶将抽出空气或燃气和堆积膜，以防止轴触摸轴承和外壳。 为了避免进行起动停机，轴承壳将被薄膜润滑剂涂覆。 对于上述和其他执行器，将开发出基于科学的基于科学的建模方法。 在开发方法时，将重点放在执行器中组件使用的可靠性中。设想的是执行器在生物医学，航空航天中的应用以及微型大小至关重要的其他消费产品。 当然，使用微型执行器具有环境友好的其他优势。