Bistable Micro Mechanisms

双稳态微机构

• 批准号: 9978737
• 负责人: Larry Howell
• 金额: $ 13.78万
• 依托单位: Brigham Young University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9978737&HistoricalAwards=false
• 关键词: Bistable; Micro; Mechanisms

Larry L. Howell, Brigham Young University Proposal Number 9978737 Bistable Micro Mechanisms Abstract: Many critical applications in microelectromechanical systems (MEMS) require that certain components be capable of being in two or more distinct and predictable positions. Examples include electrical relays and switches, microfluidic valves, microfluidic pumps, hydraulic spool valves, micro positioning of optical arrays, and mechanical switches for fiber optic circuits or other applications. Currently, most devices used in such applications have the rest position at one state such that power must be continuously supplied to the device to maintain the second position. The high energy requirements of these methods limit their practicality for large autonomous MEMS devices and arrays. Bistable devices offer an innovative alternative because they have two stable equilibrium positions. Energy input to the system is required only during the transition from one stable equilibrium position to the other. This is important for both autonomous systems that must carry their own power supply and for devices where heat must be minimized. Other major advantages of bistable mechanisms include the ability to maintain state for extended periods regardless of the status of the input power source (this is important for nonvolatile memory and other applications), and increased accuracy and precision in positioning of micro devices. Compliant mechanism theory offers the means to design successful bistable mechanisms at the micro level. Many MEMS already use flexures and other simple compliant components, but compliant mechanism theory makes possible much more complex mechanical motion. Because motion and energy storage are integrated in compliant mechanisms, they are ideal for bistable devices. The proposed approach includes the following: bistable configuration identification; modeling, analysis, and design; actuation; fabrication and testing.

拉里·豪威尔（Larry L. Howell），杨百翰大学的提案编号9978737双态微型机制摘要：微电力机械系统（MEMS）中的许多关键应用要求某些组件能够处于两个或更明显且可预测的位置。示例包括电力继电器和开关，微流体阀，微流体泵，液压阀门，光阵列的微定位以及光纤电路或其他应用的机械开关。当前，此类应用程序中使用的大多数设备都在一个状态下具有休息位置，以便必须将功率连续提供给设备以维持第二位置。这些方法的高能量要求限制了它们对大型自动MEMS设备和阵列的实用性。双态设备提供了一种创新的替代方案，因为它们具有两个稳定的平衡位置。仅在从一个稳定的平衡位置向另一个稳定平衡位置的过渡期间，才需要对系统的能量输入。这对于必须携带自己的电源的自主系统以及必须最小化热量的设备都很重要。双态机制的其他主要优势包括能够长时间维持状态的能力，无论输入电源的状态如何（这对于非挥发性内存和其他应用都很重要），以及在微设备定位方面的准确性和精度提高。合规机理理论提供了在微观层面设计成功的双态机制的手段。许多MEMS已经使用屈曲和其他简单的组件，但是兼容的机制理论使机械运动变得更加复杂。由于运动和能源存储都集成在合规机制中，因此它们非常适合双向设备。提出的方法包括以下内容：Bissable配置识别；建模，分析和设计；致动；制造和测试。