Bistable Micro Mechanisms

双稳态微机构

• 批准号: 9978737
• 负责人: Larry Howell
• 金额: $ 13.78万
• 依托单位: Brigham Young University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9978737&HistoricalAwards=false
• 关键词: Bistable; Micro; Mechanisms

Larry L. Howell, Brigham Young University Proposal Number 9978737 Bistable Micro Mechanisms Abstract: Many critical applications in microelectromechanical systems (MEMS) require that certain components be capable of being in two or more distinct and predictable positions. Examples include electrical relays and switches, microfluidic valves, microfluidic pumps, hydraulic spool valves, micro positioning of optical arrays, and mechanical switches for fiber optic circuits or other applications. Currently, most devices used in such applications have the rest position at one state such that power must be continuously supplied to the device to maintain the second position. The high energy requirements of these methods limit their practicality for large autonomous MEMS devices and arrays. Bistable devices offer an innovative alternative because they have two stable equilibrium positions. Energy input to the system is required only during the transition from one stable equilibrium position to the other. This is important for both autonomous systems that must carry their own power supply and for devices where heat must be minimized. Other major advantages of bistable mechanisms include the ability to maintain state for extended periods regardless of the status of the input power source (this is important for nonvolatile memory and other applications), and increased accuracy and precision in positioning of micro devices. Compliant mechanism theory offers the means to design successful bistable mechanisms at the micro level. Many MEMS already use flexures and other simple compliant components, but compliant mechanism theory makes possible much more complex mechanical motion. Because motion and energy storage are integrated in compliant mechanisms, they are ideal for bistable devices. The proposed approach includes the following: bistable configuration identification; modeling, analysis, and design; actuation; fabrication and testing.

Larry L. Howell，杨百翰大学提案编号 9978737 双稳态微机构 摘要：微机电系统 (MEMS) 中的许多关键应用要求某些组件能够处于两个或多个不同且可预测的位置。示例包括继电器和开关、微流体阀、微流体泵、液压滑阀、光学阵列的微定位以及用于光纤电路或其他应用的机械开关。目前，在此类应用中使用的大多数设备都具有处于一种状态的静止位置，使得必须向设备持续供电以维持第二位置。这些方法的高能量要求限制了它们在大型自主 MEMS 设备和阵列中的实用性。双稳态器件提供了一种创新的替代方案，因为它们具有两个稳定的平衡位置。仅在从一个稳定平衡位置过渡到另一个稳定平衡位置期间才需要向系统输入能量。这对于必须携带自己的电源的自主系统和必须最大限度地减少热量的设备来说都很重要。双稳态机制的其他主要优点包括无论输入电源的状态如何都能长时间保持状态的能力（这对于非易失性存储器和其他应用很重要），以及提高微型设备定位的准确性和精度。顺应机构理论提供了在微观层面设计成功双稳态机构的方法。许多 MEMS 已经使用挠性件和其他简单的柔性组件，但柔性机构理论使得更复杂的机械运动成为可能。由于运动和能量存储集成在顺应机制中，因此它们是双稳态设备的理想选择。所提出的方法包括以下内容：双稳态配置识别；建模、分析和设计；驱动；制造和测试。