SBIR Phase I: Micromachined Scintillating Pixel X-Ray Imaging Plate

SBIR 第一阶段：微机械闪烁像素 X 射线成像板

基本信息

批准号：
9761264
负责人：
Charles Beetz
金额：
$ 10万
依托单位：
NANOSCIENCES CORP
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1998
资助国家：
美国
起止时间：
1998-01-01 至 1998-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9761264&HistoricalAwards=false
关键词：
SBIR Phase Micromachined Scintillating Pixel

项目摘要

This Small Business Innovative Research Phase I project focuses oil x-ray and particle imaging of biological specimens using radionuclides, radiotracers or x-ray beams. An imaging detector requires: detection efficiency close to unity; photon counting; high spatial resolution, comparable to film; improved contrast due to insensitivity to scattered x-rays or particles; liticar intensity response; large dynamic range; low noise; and differential attenuation imaging using x-ray energies. We propose to address these issues with a novel form of' high spatial precision imaging scintillator pixel plate, fabricated by micromachining of very high aspect ratio holes (length/diameter) in silicon. The Si holes will be formed into dielectric waveguides (optical fibers) by forming a cladding film, for example by oxidizing the walls to form SiO2. The holes will be filled with standard and novel scintillation materials, including index-matched collodal dispersions of nanocrystalline photolithographic techniques, with holes from 1 um-1 mm in diamiter, and plate thickness up to about 1 mm. The scintillator array is well-matched to the precision and spatial resolution of optical pixel detectors including CCD image intensifiers and film. This program may led to novel large area, high precision x-ray imagers, enabling replacement of film or enhancing film in medical and dental x-rays. It may also lead to ultra-high precision fiber-optic plates at low cost, and compact full aperture optical and x-ray collimators.

该小型企业创新研究第一阶段项目的重点是使用放射性核素、放射性示踪剂或 X 射线束对生物样本进行石油 X 射线和粒子成像。成像探测器要求：探测效率接近一致；光子计数；空间分辨率高，堪比胶片；由于对散射 X 射线或粒子不敏感，对比度得到改善；光强度响应；动态范围大；低噪音；以及使用 X 射线能量的差分衰减成像。我们建议通过一种新型的高空间精度成像闪烁体像素板来解决这些问题，该像素板是通过在硅中对非常高深宽比的孔（长度/直径）进行微加工而制造的。通过形成包覆膜，例如通过氧化壁以形成SiO2，Si孔将形成介电波导（光纤）。这些孔将填充标准和新型闪烁材料，包括纳米晶体光刻技术的折射率匹配胶体分散体，孔直径为1微米至1毫米，板厚度可达约1毫米。闪烁体阵列与光学像素探测器（包括 CCD 图像增强器和胶片）的精度和空间分辨率非常匹配。该计划可能会带来新型大面积、高精度 X 射线成像仪，从而能够替代胶片或增强医学和牙科 X 射线中的胶片。它还可能带来低成本的超高精度光纤板以及紧凑型全孔径光学和 X 射线准直器。