CAREER: MEMS for the Masses

职业：面向大众的 MEMS

• 批准号: 9624124
• 负责人: Kristofer Pister
• 金额: $ 20万
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-07-15 至 1998-11-12
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9624124&HistoricalAwards=false
• 关键词: CAREER; MEMS; Masses

A method is proposed for the decoupling of design and manufacturing of micro- electromechanical systems (MEMS) and devices. A design infrastructure is to be developed that will allow non-experts to quickly design and simulate MEMS devices and systems. The philosophy follows the VLSI paradigm, where there is a clear separation between the wafer fabrication and the design effort that creates the pattern which is to be implemented. MEMS software tools, device models, and educational materials will be made available on the Internet. These tools will include schematic editing, layout synthesis, parameter extraction and simulation. The proposal also contains a strong education plan extending the PI's successes in recruiting undergraduates, including women and under-represented minorities, to become research students.

提出了一种用于解耦微机电系统（MEMS）和器件的设计和制造的方法。 将开发一个设计基础设施，允许非专家快速设计和模拟 MEMS 设备和系统。 该理念遵循 VLSI 范式，其中晶圆制造和创建要实现的图案的设计工作之间有明显的分离。 MEMS 软件工具、设备模型和教育材料将在互联网上提供。 这些工具将包括原理图编辑、布局综合、参数提取和仿真。 该提案还包含一项强有力的教育计划，扩大了 PI 在招募本科生（包括女性和代表性不足的少数族裔）成为研究生方面的成功。