Mass Spectrometer for Radical Species Detection During CVD of Cubic Boron-Nitride and Diamond

用于立方氮化硼和金刚石 CVD 期间自由基物质检测的质谱仪

• 批准号: 9622042
• 负责人: Mark Cappelli
• 金额: $ 6.81万
• 依托单位: Stanford University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-05-01 至 1998-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9622042&HistoricalAwards=false
• 关键词: Mass; Spectrometer; Radical; Species; Detection

Abstract Cappelli CTS-9622042 The PI proposes to purchase a molecular beam mass spectrometer (MBMS) system for-near surface radical species detection during chemical vapor deposition (CVD) growth taking place in a variety of systems currently being investigated. These systems include films of diamond, diamond-like carbon (DLC), cubic boron nitride and carbon nitride. The addition of this instrumentation to the PI's laboratory would allow him to perform a compositional and energy analysis of the impinging plasma (including ions and radicals) in order to help develop a detailed mechanistic understanding of the deposition process including the effects of ion interactions with the growth surface, and the validation of gas phase radical transport models.

摘要 Cappelli CTS-9622042 PI 提议购买分子束质谱仪 (MBMS) 系统，用于在目前正在研究的各种系统中发生的化学气相沉积 (CVD) 生长过程中进行近表面自由基物质检测。 这些系统包括金刚石、类金刚石碳 (DLC)、立方氮化硼和氮化碳薄膜。 在 PI 的实验室中添加该仪器将使他能够对撞击等离子体（包括离子和自由基）进行成分和能量分析，以帮助深入了解沉积过程，包括离子与等离子体相互作用的影响。生长表面，以及气相自由基传输模型的验证。