Integrated Optic Accelerometer with Six Degrees of Freedom

六自由度集成光学加速度计

• 批准号: 9461713
• 负责人: John Farah
• 金额: $ 7.5万
• 依托单位: Optisensors Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-01-01 至 1996-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9461713&HistoricalAwards=false
• 关键词: Integrated; Optic; Accelerometer; Six; Degrees

Conventional techniques for accelerometers yield micromechanical structures whose sensitive axis is perpendicular to the surface of the wafer. There is a need for new micromechanical designs and new transduction techniques which allow the sensitive axis of the microstructures to lie in the plane of the wafer in order to measure six degrees of freedom. A new optical transduction technique and a new micromechanical design are illustrated which allow the sensitive axis to lie in the plane of the wafer and which eliminate cross-talk. This has the advantage that several structures can be integrated monolithically in the same wafer with multidegrees-of-freedom measurement capability. The sensor incorporates a polymer waveguide and is fabricated with the use of laser ablation of materials. The major task is to develop a fabrication process which is compatible with the characteristics of all the materials utilized. A comprehensive study of all the pertinent process parameters affecting the performance of the polymer waveguide will be conducted.

加速度计的常规技术产生的微机械结构的敏感轴垂直于晶圆的表面。需要新的微机械设计和新的转导技术，这些技术使微观结构的敏感轴位于晶圆的平面中，以测量六个自由度。说明了一种新的光学转导技术和一种新的微机械设计，该设计使敏感轴位于晶圆的平面中，并消除了交叉对话。这具有一个优点，即可以通过多个自由状测量能力在同一晶片中单层整合几个结构。传感器结合了聚合物波导，并通过使用激光消融材料制成。主要任务是开发与所使用的所有材料的特征兼容的制造过程。将对影响聚合物波导性能的所有相关过程参数进行全面研究。