Instrumentation for Hybrid-Integrated Components for the Information Highway

信息高速公路混合集成组件仪表

• 批准号: 9413848
• 负责人: Richard Higgins
• 金额: $ 90万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-09-01 至 1998-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9413848&HistoricalAwards=false
• 关键词: Instrumentation; Hybrid; Integrated; Components; Information

9413848 Higgins This award is for the acquisition of semiconductor processing and testing equipment to make components necessary for efficient electronic/photonic interfaces. Georgia Institute of Technology has developed "hybrid integration" techniques that allow rf and optoelectronic functions to be incorporated on chips with costs comparable to standard chips. The equipment includes a molecular beam epitaxy unit for optoelectronic materials, a plasma-enhanced chemical vapor deposition unit for deposition of dielectric films, an ion etcher, a flip-chip aligner, a very high speed tester and polarization analyzer, and a workstation cluster for computational work. The equipment supports the design, fabrication, and testing of communications and network interface components including serial optoelectronic and wireless hybrid integrated interfaces, parallel network interfaces, and wave-division multiplex interfaces. ***

9413848希金斯该奖项是为了获取半导体处理和测试设备，以使有效的电子/光子接口所需的组件。佐治亚理工学院开发了“混合整合”技术，这些技术允许将RF和光电功能纳入其芯片上，其成本与标准芯片相当。 该设备包括用于光电材料的分子束外延，血浆增强化学蒸气沉积单元，用于沉积介电膜的沉积，离子蚀刻器，翻转芯片对准器，非常高的速度测试仪和极化分析仪，以及用于工作站群集计算工作。 该设备支持通信和网络接口组件的设计，制造和测试，包括串行光电和无线混合集成接口，并行网络接口以及波浪分割的多路复用接口。 ***