A Kinetics-Based Investigation of the Hall-Petch Effect and Solid Solution Strengthening in Refractory Metal Coatings

基于动力学的难熔金属涂层中霍尔-佩蚀效应和固溶强化研究

• 批准号: 9317479
• 负责人: Donald Stone
• 金额: $ 26.5万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-05-01 至 1998-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9317479&HistoricalAwards=false
• 关键词: Kinetics; Based; Investigation; Hall; Petch

9317479 Stone Strengthening mechanisms in molybdenum and tantalum/nitrogen thin films are explored using unique indentation apparatus. The film compositions are selected as model systems to examine solid solution strengthening and the Hall-Petch effect. Film thicknesses on the order of 2 to 5 microns are deposited on hard substrates. Emphasis is placed on determining the effects of indentation rate and temperature on the hardness, as a function of grain size, alloy content, and structure form. The kinetics of plastic deformation are characterized by load and depth sensing techniques and wafer curvature stress measurements. Results should permit a determination of how well laws governing the kinetics of deformation in bulk materials relate to behavior in thin films. %%% The research will provide an improved understanding of deformation phenomena in hard coatings. This knowledge can lead to new strategies for depositing thin films to achieve improved properties. ***

9317479使用独特的凹痕装置探索了钼和坦塔尔/氮薄膜中的石材加强机制。 膜组成被选为模型系统，以检查固定溶液的加强和霍尔西的效果。 在硬质基材上沉积了2至5微米的膜厚度。 重点是确定凹痕率和温度对硬度的影响，这是晶粒尺寸，合金含量和结构形式的函数。 塑性变形的动力学的特征是负载和深度传感技术和晶圆曲率应力测量。 结果应允许确定散装材料变形动力学的法律与薄膜行为有关。 %%％研究将为硬涂层中对变形现象提供深入的了解。 这些知识可能会导致新的策略来存放薄膜以获得改进的特性。 ***