The Dynamics of Metal Film Growth by Metal Organic Chemical Vapor Deposition

金属有机化学气相沉积金属膜生长动力学

• 批准号: 9306899
• 负责人: Eric Garfunkel
• 金额: $ 21.2万
• 依托单位: Rutgers University New Brunswick
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-08-01 至 1997-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9306899&HistoricalAwards=false
• 关键词: Dynamics; Metal; Film; Growth; Organic

9306899 Garfunkel The purpose of this project is to understand the basic metal overlayer growth dynamics of metal organic chemical vapor deposition (MOCVD) processes on surfaces. This research includes an examination of the mechanisms involved in the pyrolytic deposition of transition metal films from carbonyl M(CO)x and trifluorophosphine M(PF3)x precursors on Si, Ni, and thin film SiO2. Specific issues that will be addressed are: i) How do organometallic precursors interact and decompose on different substrates? ii) What microscopic structures occur and how do they evolve during the growth of thin metal films? iii) Can one predict which precursor would be appropriate for a desired metallization process? The metal film growth microstructures will be studied primarily by scanning tunneling microscopy (STM), and the decomposition mechanism and thermochemistry by a combination of vibrational (HREELS), compositional (XPS and AES), and desorption (TDS) spectroscopies. MOCVD results will be compared with those obtained by physical vapor deposition (PVD) methods. Both the microstructural and thermochemical results of this work should add significantly to the understanding of the science of MOCVD and to the variety of advanced materials applications which utilize thin metal films. ***

9306899 Garfunkel该项目的目的是了解表面上金属有机化学蒸气沉积（MOCVD）过程的基本金属叠加层生长动力学。 这项研究包括研究来自Si，Ni和薄膜SiO2上的羰基M（CO）X和三氟膦M（PF3）X前体的过渡金属膜的热解沉积的机制。 将要解决的具体问题是：i）有机金属前体如何在不同的底物上相互作用和分解？ ii）发生了哪些微观结构，它们在薄金属膜的生长过程中如何发展？ iii）一个人可以预测哪种前体适合所需的金属化过程？金属膜生长微观结构将主要通过扫描隧道显微镜（STM）来研究，以及通过振动（HREELS），组成（XPS和AES）和启动（TDS）的组合组合的分解机制和热化学研究。 MOCVD结果将与通过物理蒸气沉积（PVD）方法获得的结果进行比较。 这项工作的微观结构和热化学结果都应显着增加对MOCVD科学的理解，以及使用薄金属膜的高级材料应用。 ***