REU Site for Microelectronic Materials and Processing

REU 微电子材料和加工网站

• 批准号: 9200056
• 负责人: Christos Takoudis
• 金额: $ 5万
• 依托单位: Purdue Research Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-05-01 至 1993-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9200056&HistoricalAwards=false
• 关键词: REU; Site; Microelectronic; Materials; Processing

The Purdue Schools of Chemical, Electrical, and Materials Engineering, which have been sharing undergraduate courses as well as research on electronic materials and processing for several years will participate in a REU site in microelectronic materials and processing. The focus of the REU site is the synthesis, processing, properties, structure, and performance of microelectronic materials, and the interrelationships among these aspects. Specific projects include anisotropic etching of microelectronic thin films, selective epitaxial growth and three- dimensional integration, processing on patterned substrates of electronic materials, fundamentals of metal contacts to semiconductors, and 'a priori' predictions of physical and chemical properties of microelectronic materials as functions of their synthesis and processing. The goals of the REU will be to introduce students to independent research on these materials and device fabrication, to develop and enhance the students' creativity and originality, to develop outstanding candidates for graduate programs, to demonstrate the excitement and rewards from successful research, and to prepare B.S. graduates who will excel in industrial research and development environments.

普渡大学的化学，电气和材料工程学院已经共享本科课程以及对电子材料和处理的研究，将参与Microelectronic材料和处理的REU站点。 REU站点的重点是微电体材料的综合，处理，性质，结构和性能以及这些方面之间的相互关系。 特定项目包括对微电体薄膜的各向异性蚀刻，选择性的外延生长和三维整合，处理电子材料的图案化基质，对半导体的金属接触的基本原理以及“先验”的“先验”预测，以预测其合成和处理的微电子材料的物理和化学性质。 REU的目标将是向学生介绍这些材料和设备制造的独立研究，以发展和增强学生的创造力和独创性，为研究生课程培养出色的候选人，以证明成功研究的兴奋和奖励，并准备B.S.将在工业研发环境中表现出色的毕业生。