Low-Cost Technologies for Microelectromechanical Systems

微机电系统的低成本技术

• 批准号: 9117074
• 负责人: Mark Allen
• 金额: $ 58.37万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-08-15 至 1995-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9117074&HistoricalAwards=false
• 关键词: Low; Cost; Technologies; Microelectromechanical; Systems

Research is proposed on three relatively low cost and manufacturable technologies for microelectromechanical systems (MEMS), which will contribute toward enabling commercial development of these systems. The first technology is a process for integrating optical-quality compound semiconductor materials onto silicon- based microstructures. This technology, which is based on a modification of epitaxial liftoff techniques for compound semiconductor materials, will enable the development of integrated optically- based sensors and actuators. The second technology involves the use of electroplating techniques coupled with polyimide-based electroplating forms to produce a low-cost alternative to the LIGA process for fabrication of high-aspect-ration microstructures. The third technology involves the design and fabrication of simple solar cell structures that can be used as self- contained power sources for MEMS. The solar cell structures will be optimized for the high-voltage, low-current needs of electrostatic microactuators, and designed such that they can be integrated directly with standard silicon-based microstructures.

提出了针对微电力系统（MEMS）的三种相对低成本和可制造技术的研究，这将有助于实现这些系统的商业开发。 第一个技术是将光学质量复合半导体材料集成到硅基微结构上的过程。 这项技术基于对复合半导体材料的外延升降技术的修改，它将能够开发基于光学的传感器和执行器。 第二种技术涉及使用电镀技术，再加上基于聚酰亚胺的电镀形式，以生成用于制造高光谱估算微结构的LIGA工艺的低成本替代品。 第三种技术涉及简单的太阳能电池结构的设计和制造，这些太阳能电池结构可以用作MEMS的自我包含的功率来源。 太阳能电池结构将针对静电微效应器的高压，低电流需求进行优化，并设计使它们可以直接与基于硅的标准微观结构集成。