Study on the Surface Damage Layer in Multiple Grinding of Quartz Glass by Molecular Dynamics Simulation

The paper focuses on the surface damage of quartz glass in multiple grinding, so as to find out the machining parameters that can improve the surface quality of quartz glass. Molecular dynamics (MD) method is adopted to machine the quartz glass. Firstly,

本文着重研究石英玻璃在多次研磨中的表面损伤，以找出能够提高石英玻璃表面质量的加工参数。采用分子动力学（MD）方法对石英玻璃进行加工。首先，