用于微结构气体探测器的类金刚石碳阻性电极制备研究

New diamond-like carbon (DLC) resistive electrodes for micro-pattern gas detectors (MPGD) were prepared by magnetron sputtering. The influence laws of factors such as target current, vacuum degree, and element doping on the surface resistance of the DLC resistive electrodes were studied, as well as the optimization methods for the bonding strength and internal stress of the DLC resistive electrodes. The results show that as the target current increases, the surface resistance of the DLC resistive electrodes decreases; the higher the vacuum degree, the smaller the surface resistance of the DLC resistive electrodes and the better the stability; the doping of hydrogen and nitrogen elements increases the surface resistance of the DLC resistive electrodes, and the influence of hydrogen elements is more obvious. The method in this paper lays a technical foundation for the research and development and performance improvement of micro-pattern gas detectors with new configurations.

通过磁控溅射法制备了用于微结构气体探测器(MPGD)的新型类金刚石碳(DLC)阻性电极,研究了靶电流、真空度、元素掺杂等因素对DLC阻性电极面电阻的影响规律,以及DLC阻性电极结合强度和内应力的优化方法。结果表明:随靶电流的增大,DLC阻性电极的面电阻降低;真空度越高,DLC阻性电极的面电阻越小,稳定性越好;氢元素和氮元素的掺杂使得DLC阻性电极的面电阻增大,且氢元素影响更加明显。本文方法为新构型微结构气体探测器的研发和性能提升奠定了技术基础。