Laser-focused Cr atomic deposition pitch standard as a reference standard

A chromium (Cr) grating pitch standard is fabricated by a technique of laser-focused atomic deposition. Cosine errors of the grating standard are analyzed and controlled under a relative error of 6 x 10(-6) after 10-times iterative calibration. The dimension properties of the standard are measured and analyzed by a calibrated metrological atom force microscope (AFM) with large range. The experimental results show the grating standard has a good uniformity and structural periodicity. Hence, the laser-focused Cr atomic deposition grating can work as a reference standard. (C) 2014 Elsevier B.V. All rights reserved.

采用激光聚焦原子沉积技术制备了一种铬（Cr）光栅节距标准器。经过10次迭代校准后，对光栅标准器的余弦误差进行了分析，并将其控制在6×10⁻⁶的相对误差范围内。利用经过校准的大量程计量型原子力显微镜（AFM）对该标准器的尺寸特性进行了测量和分析。实验结果表明，该光栅标准器具有良好的均匀性和结构周期性。因此，激光聚焦铬原子沉积光栅可作为一种参考标准。版权所有©2014爱思唯尔出版集团。保留所有权利。