Implementation of E-Beam Proximity Effect Correction using linear programming techniques for the fabrication of asymmetric bow-tie antennas

Asymmetric nano-bow-tie antennas offer the possibility of direct light-to-electrical energy conversion. These nano-antennas are easily integrated with Metal-Insulator-Metal (MIM) tunnel junctions in between the antenna segments for the purpose of coupled signal rectification. The architecture of the tunnel junction together with the antenna size precision require nano-scale patterning accuracy. Electron Beam Lithography (EBL) is used for patterning purposes. In this paper Proximity Effect (PE), a very common resolution problem in EBL, is reduced by a dose modulation technique employing linear programming (LP) algorithms. Production of tightly controlled antenna segment dimensions is achieved in conjunction with a small area tip and a small tunnel junction gap. It is expected that precise control of the gap geometry will enhance detection speed, enabling the utilization of the device for the visible range energy harvest purposes.

不对称纳米领结天线提供了直接的光 - 电能转换的可能性。这些纳米天线很容易与位于天线段之间的金属 - 绝缘体 - 金属（MIM）隧道结集成，以实现耦合信号整流的目的。隧道结的结构以及天线尺寸精度需要纳米级的图案精度。电子束光刻（EBL）用于图案制作。在本文中，通过采用线性规划（LP）算法的剂量调制技术来减少电子束光刻中一个非常常见的分辨率问题——邻近效应（PE）。通过结合小面积尖端和小隧道结间隙，实现了对天线段尺寸的严格控制。预计对间隙几何形状的精确控制将提高检测速度，从而使该器件能够用于可见光范围的能量收集目的。