Due to the significant localized resonance enhancement and modulation effects on electromagnetic fields, surface plasmons have become one of the research hotspots in the field of micro-nano optics since their discovery, and have great potential in many applications of nano-scale devices. However, for a long time, the practical applications of surface plasmons have been significantly limited by sample preparation techniques. The lack of low-cost preparation techniques for ultra-smooth and low-loss noble metal films has not only hindered the progress of experimental research, but also limited the application and development of surface plasmon materials in many fields. With the development of various preparation and characterization techniques, the flatness and optical properties of noble metal films have gradually changed from theoretical expectations to practical use, and from random selection after preparation to precisely controlled film growth. Starting from three aspects of preparation, characterization and application, this article systematically introduces the current research progress and frontier applications of noble metal ultra-smooth surface plasmon films.
由于对电磁场巨大的局域化共振增强和调控作用, 表面等离激元自发现之初就成为微纳光学领域的研究热点之一, 在很多纳米尺度器件应用方面颇具潜力. 然而, 长期以来表面等离激元的实际应用受到样品制备技术的显著限制, 超平整、低损耗贵金属薄膜的低成本制备技术的缺乏不仅阻碍了其实验研究的进展, 更限制了表面等离激元材料在多个领域内的应用发展. 随着各项制备和表征技术的发展, 贵金属薄膜的平整度和光学特性逐渐从理论期望走向实际使用, 从随机制备后选取逐步变为精确调控的薄膜生长. 本文从制备、表征和应用三个方面出发, 系统地介绍了当前贵金属超平整表面等离激元薄膜的研究进展与前沿应用.