Using solid-source molecular beam epitaxy (SSMBE) technology, graphene films are epitaxially grown by depositing carbon atoms on a Si(111) substrate. The films grown at different substrate temperatures (400, 600, 700, 800 °C) are structurally characterized by means of reflection high-energy electron diffraction (RHEED), infrared absorption spectroscopy (FTIR), Raman spectroscopy (RAMAN) and X-ray absorption fine structure spectroscopy (NEXAFS). The results of RAMAN and NEXAFS show that the film prepared at 800 °C has the characteristics of graphene, while the samples grown at 400, 600 and 700 °C are amorphous or polycrystalline carbon films. The results of RHEED and FTIR show that when the deposition temperature is below 600 °C, the C atoms and the substrate Si atoms...
利用固源分子束外延(SSMBE)技术, 在Si(111)衬底上沉积碳原子外延生长石墨烯薄膜, 通过反射式高能电子衍射(RHEED)、红外吸收谱(FTIR)、拉曼光谱(RAMAN)和X射线吸收精细结构谱(NEXAFS)等手段对不同衬底温度(400、600、700、800℃)生长的薄膜进行结构表征. RAMAN和NEXAFS结果表明: 在800℃下制备的薄膜具有石墨烯的特征, 而 400、600和700℃生长的样品为非晶或多晶碳薄膜. RHEED和FTIR结果表明, 沉积温度在600℃以下时C原子和衬底Si原