Correcting scanning instabilities from images of periodic structures

A method for measuring and correcting the row displacement errors in lattice images acquired using scanning based methods is presented. This type of distortion is apparent in lattice-resolved images acquired using scanning-based techniques such as scanning transmission electron microscopy (STEM) and translates to vertical streaks convolving every feature in Fourier space. This paper presents a method to measure and correct the distortion based on the phase analysis of the streaks in Fourier space. The validity and the precision of the method is demonstrated using a model image and two experimental STEM images of Si < 110 > thin film and a 5 nm CoPt disordered nanocrystal. The algorithm is implemented in a freely available Digital Micrograph (TM) script. (C) 2012 Elsevier B.V. All rights reserved.

提出了一种测量和校正使用基于扫描的方法获取的晶格图像中行位移误差的方法。这种类型的畸变在使用基于扫描的技术（如扫描透射电子显微镜（STEM））获取的晶格分辨图像中很明显，并转化为在傅里叶空间中使每个特征卷积的垂直条纹。本文提出了一种基于傅里叶空间中条纹的相位分析来测量和校正畸变的方法。使用一个模型图像以及硅<110>薄膜和一个5纳米CoPt无序纳米晶体的两个实验性STEM图像证明了该方法的有效性和精度。该算法在一个可免费获取的Digital Micrograph（TM）脚本中实现。（C）2012爱思唯尔公司。保留所有权利。