离子束辐射诱导的纳米谐振子与三维超导回路耦合机理研究

Research on coupling mechanism between nanoresonator and 3D superconducting circuit is the cutting-edge of NEMS research field. Focused-ion-beam chemical vapor deposition (FIB-CVD) is a potential useful method for realizing the coupling between nanoresonator and 3D superconducting circuit. However, research on superconducting mechanism of FIB induced W-C nanomaterials, controllable fabrication of W-C nanomaterials and physical properties of W-C based novel superconducting nanodevices are still insufficient, which greatly restrict the realization of coupling between nanoresonator and 3D superconducting circuit. In this project, we use a method combining theoretical analysis, simulation and experimental research to study these problems. Firstly, on the basis of analyzing microstructure and component ratio W-C nanomaterials, we use superconducting BCS theory to develop the theoretical model to study the transport mechanism of superconducting Cooper pairs in W-C nanomaterials. Secondly, both radiation process of ion beam and deposition process of gas precursor (W(CO)6) are integrated to build the complete the growth model of 3D W-C materials. Based on this model, we develop a useful computer-aided-manufacturing system to realize effective control on 3D growth process of W-C materials. Finally, the coupling mechanism of nanoresonator and 3D superconducting circuit is studied. Novel devices based on this mechanism are fabricated and physical properties are studied. The realization of this project not only provides a novel method to study the macro quantum effect, but also provides useful tools for the study in photodetection, biological science and medical science.

探索纳米谐振子与三维超导回路的耦合是当前NEMS领域研究的发展趋势。利用离子束辐射诱导沉积法是实现纳米谐振子与三维超导回路耦合的潜在有效方法，目前的研究在碳-钨纳米材料的超导物理机制、碳-钨三维纳米材料的可控制备和新型超导纳米器件的物理特性等方面存在不足。本项目拟采用理论分析、模拟仿真和实验研究相结合的方法对上述问题进行研究。首先，在分析碳-钨纳米材料的化学成分和物质结构的基础上，结合超导BCS理论建立其超导输运模型。其次，综合考虑离子束辐射过程和前驱气体沉积过程，建立完整的模型准确地揭示碳-钨纳米材料的三维生长规律，在此基础上探索基于碳-钨纳米材料生长特性的制备过程控制方法。最后，制备出新型超导纳米器件并研究其物理特性。项目成果不仅可为研究宏观量子效果、开发新型量子器件提供新的思路，还可以为光电探测、生命科学和医疗等领域的研究提供重要的工具，具有非常重要的理论意义和实际应用价值。

探索纳米谐振子与三维超导回路的耦合是当前NEMS领域研究的发展趋势，利用离子束辐射诱导沉积法是实现纳米谐振子与三维超导回路耦合的潜在有效方法。本项目开展了离子束辐射诱导的碳-钨纳米材料超导输运特性、三维生长特性以及纳米谐振子与三维超导回路动力学耦合机制等三个方面的研究内容。首先，分析了碳-钨纳米材料的化学成分和物质结构的变化对超导特性的影响，在超导BCS理论的基础上研究碳-钨纳米材料中超导库珀对的形成及传输机制，建立了碳-钨纳米材料的超导库珀对输运模型，揭示了离子束辐射诱导的碳-钨无定形纳米材料的电声交互作用机制。其次，建立了前驱气体W(CO)6受离子束辐射诱导的沉积模型，分析入射离子、反射电子和二次电子等带电粒子辐射能量分布及前驱气体密度等因素对碳-钨纳米材料空间生长速率、化学成分分布的影响规律，依据沉积模型制备出了宽度仅为5nm的纳米间隙，为截止到2018年已报道的最高精度。再次，初步开展了纳米谐振子与三维超导回路的动力学耦合方式研究，制备出了具有空间结构的碳-钨纳米线和融合了纳米谐振子的三维超导回路，结合超导库珀对在三维超导回路中的传输方式，探索了纳米谐振子与三维超导回路的动力学耦合机制。

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