基于功能化石墨烯敏感材料的LC无源无线气体传感器研究

With the development of IOT (Internet of things) and its application in the filed of agriculture and animal husbandry, the passive wireless gas sensor has become one of the most important bottlenecks for further development. In the agricultural and animal husbandry production activities, the detection of toxic gas is extremely important, while special requirements have been put forward on the high-performance gas sensors accordingly. The gas sensors must meet the requirements of rapid response and miniaturization simultaneously in normal temperature environment. By means of MEMS technology, for the first time, we propose a passive wireless gas sensor structure scheme with fast response in normal temperature environment. The main innovations of this structure include: (1) a plane spiral heating structure driven by wireless mode,(2) achieving “baseline state” of gas sensor by resetting with the micro-heater, to improve the zero drift and the long time of gas adsorption/desorption process and (3) integrated monolithic design of passive wireless sensor working at room temperature. The core content of our research is to establish a complete design method and theory of the LC type passive wireless gas sensor, that include: (1) the structure of the heater, (2)resetting the sensor wirelessly, (3) gas sensitive structure design based on functionalized graphene. Through the fabrication process study, the principle prototype will be developed, which will lay the foundation for the design and future application of LC passive wireless gas sensor.

随着物联网产业的发展以及在农牧业领域的应用，无源无线气体传感器成为农牧业物联网发展应用的重要瓶颈之一。在农牧业生产活动中，有毒气体的检测极为重要，相应的对高性能气体传感器提出了特殊要求，传感器必须同时满足常温环境下快速响应以及微型化等要求。采用MEMS技术，本项目首次提出一种常温环境快速响应的无源无线气体传感器结构方案，其主要创新点包括：（1）无线驱动的平面螺旋加热结构；（2）通过加热的微平面螺旋电感复位传感器，改善器件气体敏感过程中的响应可逆性差及吸附/脱附时间较长的问题；（3）常温工作的无源无线气体传感器单片集成化设计。本项目的核心研究内容是建立完整的LC无源无线气体传感器设计方法和设计理论，包括：（1）传感器加热结构方案；（2）无线控制传感器实现复位；（3）基于功能化石墨烯气敏结构设计。通过工艺研究，研制出原理样机，为LC无源无线气体传感器设计和未来应用奠定基础。

在农牧业生产活动中，有毒气体的检测极为重要，相应的对高性能气体传感器提出了特殊要求，传感器必须同时满足常温环境下快速响应以及微型化等要求。该项目旨在研究基于MEMS技术的无源无线传感器，以满足气体传感器对有毒气体快速响应且小型化监测应用的需求。采用MEMS技术，本项目提出一种常温环境快速响应的无源无线气体传感器结构方案，研究了无源无线气体传感器的设计和制造技术。对功能石墨烯气敏材料的制备工艺进行了研究。探讨了气体传感器中加热器结构的设计方法。建立了一个加热模型，并研究了漂移补偿算法。对开发的气体传感器进行了测试。通过项目研究，建立起完整的LC无源无线气体传感器结构设计、工艺设计、加热板设计在内的传感器设计方法。通过优化工艺，制备了传感器原型，其性能指标满足项目预期要求。项目执行期间，共发表高水平文章9篇，Sci论文7篇，其中EI会议论文2篇；申请中国发明专利9项；培养硕士研究生5名。

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