单片集成硅基灵活栅格模式波长选择光开关研究

Due to the continuous emergence of bandwidth-consuming applications, Internet traffic is growing exponentially. In order to accommodate the increasing Internet traffic demand, optical networks have to evolve to improve the spectrum efficiency and increase the transmission capacity. .Elastic optical networks (EONs) with flexible nature is emerged as a very promising solution that can efficiently and flexibly utilize spectrum resources. Meanwhile, space division multiplexing (SDM) in which an additional degree of freedom in the form of the new “space” dimension is used can multiply the capacity by the spatial channel count. In SDM-EONs, flexible-grid mode- and wavelength-selective switches play an important role. They have become necessary for SDM-EONs to simultaneously handle each mode, each wavelength, and a mixture of different channel bandwidths..In this project, a monolithic integrated silicon-based flexible-grid mode- and wavelength-selective switch using reconfigurable mode-selective switches based on cascaded symmetric Y-junctions and bandwidth-tunable wavelength-selective optical routers based on microring resonators will be proposed and experimentally demonstrated. The working mechanism of the monolithic integrated silicon-based flexible-grid mode- and wavelength-selective switch will be firstly investigated. And then, the transmission characteristics of the monolithic integrated silicon-based flexible-grid mode- and wavelength-selective switch will be evaluated and analyzed. Finally, the designs for the monolithic integrated silicon-based flexible-grid mode- and wavelength-selective switch will be demonstrated by electron-beam lithography and inductively coupled plasma etching. The presented device can find its application in flexible, dense, on-chip optical interconnect network. The findings of this research will offer scientific support for our country to master key technologies of a new generation of information technology.

为了满足日益增长的弹性带宽需求，发展新型光网络技术势在必行。通过采用灵活栅格技术，可增加带宽分配灵活性，提高频谱资源利用率。而空分复用技术则利用空间维度作为新的自由度，可成倍提升传输容量。随着空分复用和灵活栅格技术引入，如何在空间频谱灵活光网络中实现信道带宽灵活分配以及波长与模式动态调度成为亟待解决的关键问题。本项目拟从物理层实现角度考虑并从光子集成发展角度出发，着重研制单片集成硅基灵活栅格模式波长选择光开关。具体研究内容包括：探明以Y分支波导和微环为基本单元的硅基灵活栅格模式波长选择光开关工作机理；剖析硅基灵活栅格模式波长选择光开关传输特性，建立器件光学性能与结构参数的内在联系；利用电子束光刻等工艺制备硅基灵活栅格模式波长选择光开关并采用垂直耦合系统进行器件功能验证分析。本项目所形成的研究成果可推动智能重构、大容量、高度集成片上光互连网络的发展，为我国掌握新一代信息技术提供科学支持。

灵活栅格技术可增加带宽分配灵活性，提高频谱资源利用率。空分复用技术则利用空间维度作为新的自由度，可成倍提升传输容量。空分复用和灵活栅格技术的引入为解决带宽瓶颈问题提供了有效途径。而硅基灵活栅格模式波长选择光开关是构建空间频谱灵活光网络的关键器件之一。因此，本项目从物理层实现角度考虑并从光子集成发展角度出发，通过探明硅基灵活栅格模式波长选择光开关工作机理；分析其传输特性，优化其结构参数，制备相应的单片集成硅基灵活栅格模式波长选择光开关，并加以测试验证。本项目所形成的研究成果可用于推动智能重构、大容量、高度集成片上光互连网络的发展，为我国掌握新一代信息技术提供科学支持。此外，为了探索光网络多维复用技术实现，本项目对片上多维复用光网络中的核心集成光子器件也开展了探索研究工作，包括偏振分束器、功分器、偏振不敏感的光开关等。另外，在本项目实施过程中，课题组针对片上逻辑器件、中红外光波导传感器也开展了相关的基础研究工作。本项目实施期间，已发表期刊论文共计20篇，其中EI收录1篇，SCI收录19篇；授权发明专利4项，申请发明专利3项；参与本项目的博士3人，其中2人获得职称晋升，硕士在读研究生8人，目前均已按时毕业，其中2人获得校优秀学位论文，1人获得校卓创学位论文。

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