硅-玻璃-硅三层键合的微玻璃球壳谐振器制造方法研究

This project mainly studies on the manufacturing method of micro spherical glass shell resonator based on silicon-glass-silicon triple-stack anodic bonding. Compares with the existing research, the novel silicon-glass-silicon triple-stack anodic bonding process has the advantages of simple process, low cost, and high assembling accuracy. First, the mechanism of microscale glass-blowing is studied to establish the glass-blowing model, and design the structure of spherical glass shell resonator. Second, a micro spherical glass shell resonator manufacturing method based on silicon-glass-silicon triple-stack anodic bonding is discussed. It focuses on the glass-blowing method, the cooling and metallization method of spherical glass shell, and the silicon-glass-silicon triple-stack anodic bonding process. Finally, the principle prototype of designed micro spherical glass shell resonator is fabricated, meanwhile, build the test platform of the micro spherical glass shell resonator based on laser Doppler method. Than perform the testing of the fabricated resonator, and evaluate the structural principle of micro spherical glass shell resonator gyroscope.

本项目研究基于硅-玻璃-硅三层结构键合的微型玻璃球壳谐振器的制造方法。与现有研究相比，本项目提出采用新型的硅-玻璃-硅三层键合工艺实现玻璃球壳谐振器电极的制备及装配，具有工艺简单、成本低、装配精度高的特点。首先对微尺度玻璃吹制机理进行分析，建立微型玻璃球壳吹制工艺建模，设计微型玻璃球壳谐振器结构；进而开发基于硅-玻璃-硅三层结构键合的微型玻璃球壳谐振器制造工艺方法，重点研究玻璃吹制方法、玻璃球壳冷却方法、玻璃球壳表面金属化方案以及硅-玻璃-硅三层结构键合方法等；最后加工出微型玻璃球壳谐振器原理样机，并搭建基于激光多普勒方法的玻璃球壳谐振器频率测试平台，完成玻璃球壳谐振器初步检测，并对其构成的玻璃球壳谐振陀螺原理样机进行评估。

本项目以航空航天、武器装备等领域迫切需求的小体积、低功耗、高精度微机械陀螺为研究对象，提出一种硅-玻璃-硅三层键合的微玻璃球壳谐振器制造方法，目标是实现微尺度玻璃球壳谐振器的低成本、高可靠性制备。本项目首先突破了一种基于热解释气材料的新型微尺度玻璃吹制技术，通过添加合适的热解释气材料，在降低硅深刻蚀工艺难度的条件下有效提高了吹制工艺的出气量，获得了高径深比的微尺度玻璃球壳结构；突破了玻璃球壳的快速冷却方法，并提出了玻璃球壳倒置吹制方案，解决了冷却过程中玻璃球壳的塌陷问题；突破了硅-玻璃-硅三层键合技术，实现了微玻璃球壳谐振器与检测电极的工艺集成。.通过本项目提出的基于解释气材料的玻璃吹制工艺，仅通过200μm深的吹制孔即可得到高径比达到0.79的玻璃球壳结构，极大降低可硅深刻蚀工艺的难度，同时有效降低球壳谐振器的固有频率。.

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