基于光子晶体理论的小型电可调谐半导体滤波器研究

Future applications need filters with compact size and high quality factor. For 5G and future wireless communications, next generation band pass filters which are compatible with common semiconductor technology are required. Photonic crystal filter has the advantages of compact size, high quality factor and strong noise suppression ability. However, widely use of the filter is difficult based on the traditional method of filter design and processing. It is found that the problem can be avoided by a new way of filter frequency tuning method. Based on that, a new filter design technique for future wireless communication application will be developed. Therefore, based on the investigation of realizing a compact, tunable photonic crystal band pass filter, the approach and the basic science problems for filter design will be studied in this project..With theoretical analysis and experimental verification, three methods will be studied. (1) the design method of compact filter based on photonic crystal scaling theory; (2) a new tuning method of photonic crystal filter’s defect mode frequency; (3) the design model of compact multi-band photonic crystal filter. The design theory and method for achieving tunable and multi-band photonic crystal filters will be explored. The research is helpful to solve the difficult problems of current filter designs. It is expected to lay the foundation for future filter application and research.

微波滤波器技术小型化，高品质因数是未来发展趋势，特别是5G以及未来通讯领域中需要一种能兼容成熟半导体工艺的下一代滤波器。光子晶体滤波器具有结构紧凑，高品质因数，噪声抑制强等优势，但传统滤波器的设计加工方法很难实现广泛应用。前期研究发现通过一种新的滤波器频率调谐方式可避免传统光子晶体滤波器的设计及加工难题，有望实现一种满足未来无线通讯发展的滤波器设计技术。因此本项目拟基于前期研究工作，以小型电可调谐光子晶体滤波器为研究载体，研究滤波器设计中的基础科学问题和技术实现方法。.采用理论分析并实验验证的方式重点研究：(1)基于光子晶体缩放法则理论的滤波器小型设计机理；(2)光子晶体缺陷态频率的新型调谐机理；(3)多信道光子晶体滤波器的设计模型。通过上述研究探索小型电可调谐光子晶体滤波器和多信道滤波器的设计理论及方法。上述研究有助于解决目前滤波器研究的难点问题，预期为未来滤波器的研究工作奠定基础。

基于微波光子晶体结构研究设计小型高效无源滤波器，尤其是针对6G无线通讯应用，研究能够多频带滤波、工作频率可调节的带通滤波器设计技术对推动移动终端设备的小型化、集成化具有至关重要的意义。本项目研制了多种光子晶体结构滤波器，重点解决滤波器能耗降低、工作频率受滤波器尺寸限制、滤波器多频带高性能工作等关键问题，设计实现多种新型滤波器，尤其是实现了基于光子晶体材料的小型毫米波带通滤波器，五频带可重构带通滤波器以及电可调谐带通滤波器，有望另辟蹊径突破限制滤波器在我国移动通信应用的关键技术瓶颈。共发表相关论文13篇，其中以第一作者发表高质量SCI论文8篇。第一发明人授权国家发明专利6项。目前相关技术已在无锡好达电子股份有限公司，广西芯百特微电子有限公司进行产业化应用，项目产业化前景十分乐观，相关研究有望突破长期以来限制滤波器在移动通信应用的关键技术瓶颈。

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