用于同步辐射测量的阻性MicroMEGAS研究

MicroMEGAS and GEM detectors has recently become the research focus in the new micro-pattern gaseous detector field. Institute of High Energy Physics has kept up with the latest progress of international development and the independent research of Bulk-MicroMEGAS detector has been made. Successfully developed a detector with effective area of 80mm×80mm accumulated a wealth of experience of the detector. The application on this basis, that would make further research on the domestic development of resistive MicroMEGAS detector with active area of 200mm×200mm using Bulk fabrication process. The resistive anode chose the processing technology of resistive coating and the resistive film (under high temperature and room temperature). Measured and analyzed the relationship of the electron bunch distribution in strip, sparking rate and the surface resistance of the resistive film in different conditions of working gas, electric field and counting rate. Optimized the design of the resistive structure to inhibit sparking rate and improve the performance of MicroMEGAS detector. Met the detection demand of synchronous radiation's high counting rate (>100kHz/cm2) and position resolution (<200μm). Finally the one-dimensional diffraction detection and two-dimensional prototype detector developed and should been used for the synchrotron radiation in the energy range of 10keV. The investigation would accumulate a wealth of technical experience and provide strong scientific foundation for the production process of resistive anode MicroMEGAS detector and the application research of synchrotron radiation diffraction imaging.

近年来MicroMEGAS和GEM成为微结构气体探测器研究领域的研究热点，高能物理研究所跟踪最新研究进展，开展了基于Bulk工艺的MicroMEGAS探测器自主研究工作，成功研制出有效面积80mm×80mm的探测器。本项目在此研究基础之上，采用Bulk制作工艺进行有效面积200mm×200mm的阻性MicroMEGAS探测器国产化研制，利用阻性镀膜和阻性胶膜（高温、常温）工艺，分析探测器在不同工作气体、不同电场、不同计数率下，读出条上电子束团分布、打火率和阻性膜面电阻之间的关系；优化设计阻性结构，抑制打火，提高探测器性能，实现同步辐射计数率>100kHz/cm2和位置分辨率<200μm的探测需求，研制可用于同步辐射10keV能量范围的一维衍射探测器和二维原型探测器。本研究将为阻性MicroMEGAS探测器制作工艺和同步辐射衍射成像应用研究等方面积累丰富的技术经验和提供有力的科学依据。

Micromegas成为微结构探测器领域的研究热点，高能物理研究所跟踪最新研究进展，开展了基于Bulk工艺的Micromegas探测器自主研究，成功研制了200mm×200mm的探测器，实现了 探测器自主研制，按照项目任务书，解决了三个关键技术研制问题。实现了自主研制出基于传统Bulk工艺制作，利用小面积四层成像方案实现了200mm×200mm探测面积的阻性Micromegas探测器。利用阻性FR4读出板和阻性镀膜（100nm~500nm的阻性Ge粉）工艺方法，确定阻性探测器制作方案（~500nm的阻性Ge层），测量不同工作气体、不同电场、不同计数率下，增益测量、打火率等结果；面向同步辐射探测的高计数率（>100kHz/cm2）、空间位置分辨实现152μm（<200μm）的测量结果。在高能物理研究所同步辐射生物大分子站衍射测量，优化设计阻性膜的电阻值和读出条结构，提高探测器性能，使得阻性Micromegas探测器性能可满足能量在6keV~20keV内同步辐射衍射测量、初步成像测量以及结果分析。由于探测器优良的分辨率，可以在时间投影室气体探测器测量中，开展优良分辨的径迹探测模块应用研究。

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