超声悬浮传送平台驱动机理及原型设计

In order to satisfy the requirements of tidy, low power and high stability to presice components in field of biological engineering, medical equipment, semiconductor and so on. A new NFAL transport prototype without horn was proposed. The mechanism of levitation and transport with mixed wave driving was revealed by the analysis of wave form and squeeze film characteristics in ultrasonic exciting environment; Also, the electric, solid and acoustic coupled FEM model was established to investigate the transport platform modal shapes and sound pressure distribution in near field, based on which, a squeeze film theoretical model for free levitation was established, in order to estimate the bearing capacity and stability; Then, The prototype and experiment was designed to verify the driving mechanism and transport feasibility. The offset and phase of exciting voltage can achieve the stable travelling and standing waves driving in either orthogonal direction. The levitation and driving capacity of NFAL transport platform without horns can be verified in this experiment and further to achieve the goal of parameters optimization. This project is expected to make progress in following areas, including the levitation and driving mechanisms, the electric, solid and acoustic coupled filed simulation, free levitation squeeze film model considering of exciting modal shapes, stability mechanism affected by offset voltage and wave number, self compensation driving system in resonance and so on. These achievements can partly solved the problem of accuracy maintaining and pollution control in transport and temporary storage for precise components and provide it technical support and prototype design.

为了满足生物工程、医疗器械、半导体行业对精密元件纯净度和高稳定性生产运输环境的要求，提出了一种新型无变幅装置超声悬浮传送机构，通过对驱动过程混合波形的模拟及超声挤压膜特性的研究，揭示超声传送平台承载及输送机理；建立电-固-流耦合有限元模型，研究传送平台固有特性及近场声压分布，在此基础上，建立基于模态振型的自由态悬浮超声挤压膜模型，计算超声传送平台承载能力及悬浮精度；搭建超声悬浮传送机构机理及可行性验证实验平台，通过偏置电压激励及压电元件相位控制实现正交方向行波和驻波的稳定驱动，验证无变幅超声悬浮传送平台的承载及驱动能力以及实现参数的优化配置。项目预期取得挤压膜悬浮-驱动机理分析，电-固-流耦合声场模拟，振型相关自由态悬浮模型，偏置电压及波长对稳定性影响机制、超声谐振及自补偿驱动系统搭建等方面的突破，为解决现代制造领域精密元件运输、暂存过程精度保持及污染物控制等问题提供技术支持及原型设计。

为了满足现代制造业对塑化成型半导体元件在清洁度、低能耗及集成化制造输送方面的需求，非接触式超声载运平台逐渐进入精密制造领域。项目利用非平行超声挤压膜所形成的区域密度梯度特性，提出了一种基于逆动压效应的新型高承载超声悬浮传送机构，实现了精密元件的稳定悬浮传送。项目从声悬浮驱动波形特点和非平行挤压膜流体动力理论入手，揭示了逆动压效应的产生机理；利用电-固-流耦合有限元模型，计算了传送平台固有特性及近场声压分布，耦合模态振型获得自了由态悬浮非平行挤压膜控制方程，计算了传送平台承载能力及悬浮精度；利用谐振点追踪闭环控制方法搭建可行性测试平台，验证了系统逆动压输送能力及实现参数的优化配置。研究成果有助于提高声悬浮平台承载能力及控制精度，突破了现有声悬浮系统在功效比及悬浮稳定性方面的技术瓶颈，实现了精密半导体元件输送过程系统整合，为解决现代制造领域精密元件运输、暂存过程精度保持及污染物控制问题提供了参考。项目在完成任务书要求的同时，积极寻求拓展，不仅在宏观超声领域实现了诸如超声悬浮、超声传送、超声挤压轴承等方面实现了突破，并逐渐进入到围观研究领域，在声镊技术、微观粒子束缚及组装、超声3D打印方面也取得了可观的技术成果。通过和英国布里斯托大学、布鲁内尔大学，以色列理工学院、东京理科大学等国际顶尖超声机构的联合研究，提高了团队的国际影响力，并将团队超声悬浮方面的理论和技术水平推向了新的高度。

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