基于跨尺度结构化CVD金刚石砂轮的硬脆微结构表面超精密磨削加工技术

Ultra-precision grinding has been an important solution channel and research hot topic for precision machining of micro-structured surfaces on hard and brittle materials which widely applied in aerospace, biological engineering and micro-electronics and optical engineering. However, the serious tool wear and long grinding path has never been thoroughly solved, which still limits the improvement of machining accuracy and efficiency. In aiming to solve these problems, this project firstly will investigate the picosecond laser machining method to efficiently generate trans-scale structured CVD diamond wheels which both have the millimeter structures and micrometer structures. And then the grinding mechanisms of hard and brittle materials, such as alumina oxide (Al2O3) and Silicon Carbide (SiC), will be analyzed with these obtained trans-scale structured CVD diamond wheels. Subsequently, the grinding process of micro-structured surfaces will be optimized based on the fundamental study. In addition, the on-line wear monitoring and the on-site abrasive reshaping of the trans-scale structured CVD diamond wheels will be studied. Through the systematically research of this proposed project, the hard and brittle micro-structured surface grinding theory and technology with trans-scale structured CVD diamond wheels will be established with independent intellectual property rights. The research deliveries will no doubt present the technological fundaments for the high efficiently and high precision machining hard and brittle micro-structured surface.

超精密磨削是实现航空航天、生物工程、微电子工业及光学工程等领域中硬脆微结构表面高精度制造的重要途径和研究热点，但现有技术存在砂轮极易磨损和磨削路径过长等问题，制约了其加工精度和加工效率的提高。为此，本项目开展CVD金刚石砂轮表面的跨尺度结构化皮秒脉冲激光加工研究，制备表面同时具有毫米级结构和微米级阵列的新型CVD金刚石砂轮，并以此为磨削工具，针对氧化铝陶瓷和碳化硅陶瓷等硬脆材料，揭示跨尺度结构化CVD金刚石砂轮作用下的硬脆材料磨削机理，建立基于跨尺度结构化CVD金刚石砂轮的硬脆微结构表面超精密磨削工艺，提出跨尺度结构化CVD金刚石砂轮的磨损在线监测及在位激光锐化方法，最终形成具有自主知识产权的面向硬脆微结构表面的跨尺度结构化CVD金刚石砂轮精密磨削理论及技术，从而为实现硬脆微结构表面的高精度和高效率制造奠定技术基础。

超精密磨削是实现航空航天、生物工程、微电子工业及光学工程等领域中硬脆微结构表面高精度制造的重要途径和研究热点，但现有技术存在砂轮极易磨损和磨削路径过长等问题，制约了其加工精度和加工效率的提高。为此，本项目开展了CVD金刚石砂轮表面的跨尺度结构化皮秒脉冲激光加工研究，开发了水膜辅助激光加工CVD金刚石加工系统，优化了CVD金刚石的皮秒激光烧蚀加工工艺，制备了表面同时具有毫米级结构和微米级阵列的新型CVD金刚石砂轮，并以此为磨削工具用于微结构表面的加工制造。建立了结构化CVD金刚石的三维形貌模型，利用模型对结构化CVD金刚石磨削工具的磨削液流场进行了仿真分析。探究了结构化参数对结构化CVD金刚石磨削工具磨削性能的影响。针对碳化硅陶瓷等硬脆材料，揭示了跨尺度结构化CVD金刚石砂轮作用下的硬脆材料磨削机理，建立了基于跨尺度结构化CVD金刚石砂轮的硬脆微结构表面超精密磨削工艺，进行了微结构表面的仿真模拟与实验研究，实现了从目标的工件微结构表面到结构化砂轮制备以及磨削工艺参数选择的逆向设计，并研究了磨削回转轴对称菲涅尔微结构时的表面波纹度特征。研究了结构化参数对结构化CVD金刚石磨削工具磨损特性的影响，提出跨尺度结构化CVD金刚石砂轮的磨损在线监测方法，并进行了跨尺度结构化CVD金刚石砂轮磨削柱面及微齿螺纹微结构表面的实验研究，最终形成了具有自主知识产权的面向硬脆微结构表面的跨尺度结构化CVD金刚石砂轮精密磨削理论及技术，从而为实现硬脆微结构表面的高精度和高效率制造奠定了坚实的技术基础。

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