基于“拼接-复制”法的分区闪耀宽波段光栅研制

The broadband grating is the core optical element of a broadband spectrometer such as an imaging spectrometer and a spectrophotometer. However, the fabricating method of the existing broadband grating is complicated in process, high in cost, and limited in size and type. Based on the above analysis, a general method for global optimization design of partition-blazed gratings is established, the structural parameters of the partition-blazed gratings are designed, and each grating partition is fabricated. The mathematical model between the diffractive wavefront error and the mosaic error of the gratings in different partitions during the grating mosaic is established, the mechanism of the effect of the mosaic error on the diffractive wavefront is explored, and the decoupling method of the mosaic coupling error is proposed; then, the mosaic error solution equation system is constructed, the mosaic steps of the grating are designed, and a general method for perfect mosaic of gratings based on interferometry is established. The detection optical path structure of the mosaic error is designed and the mosaic accuracy requirements are analyzed. The high-precision adjustment device of mosaic error is manufactured, grating partitions according to the wavefront requirements of broadband grating are mosaicked, and the curing replication process at room temperature is studied. Based on the "mosaic-replication" method, a partition-blazed broadband grating with little difficulty in fabrication, low in cost, and unlimited in size and type is developed. This research can expand the development methods and types of broadband gratings, which is of great significance for the development and application of broadband spectrometers.

宽波段光栅是成像光谱仪、分光光度计等宽波段光谱仪器中的核心光学元件，而现有宽波段光栅的制作方法工艺复杂、成本高、所制作的光栅尺寸和类型有限。鉴于此，拟建立一种分区闪耀光栅全局优化设计的通用方法，设计分区闪耀光栅的结构参数，并制作各光栅分区；建立各光栅分区拼接时光栅衍射波前差与拼接误差之间的数学模型，探究拼接误差对光栅衍射波前的作用机理，进而提出拼接耦合误差的解耦方法、构建拼接误差的求解方程组、设计光栅拼接步骤，建立一种基于干涉测量技术的拼接光栅严格拼接的通用方法；设计拼接误差的检测光路结构，分析拼接精度要求，研制高精度拼接误差调整装置并根据宽波段光栅的波前要求拼接各光栅分区，结合所研究的常温固化复制工艺，基于“拼接-复制”法研制出具有制作难度小、成本低、不受尺寸和类型限制的分区闪耀宽波段光栅。本研究可拓展宽波段光栅的研制方法和类型，对宽波段光谱仪的发展和应用具有重要意义。

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