低驱动电压聚合物/硅垂直梳齿执行器的多自由度耦合运动与控制研究

Vertical comb actuators can be widely used in precision instruments and consumer electronics. The trends of miniaturization and low power consumption of devices and systems require the actuators to achieve large torsional displacement at a low actuation voltage. This project targets the bottleneck of the electrostatic comb actuator technology, i.e., high actuation voltage and low stroke; present the possibility to replace silicon torsional spring with a soft polymeric spring to reduce the actuation voltage. Nevertheless, the performance of this comb actuator is still limited by the bending and creeping of the polymeric torsional springs. The project, focusing on these limitations, will firstly explore the mechanism of the multi-DOF displacement and creeping of the actuator device under a combined torsion/bending load, and then propose a control method for the actuator under a complex movement and creeping scheme. The project will establish a systematic design rule for the actuator with the aim of large torsional displacement and small bending movement, fabricate the device with a novel self-aligned process, and characterize the device. In addition, the multi-DOF displacement and creeping mechanism will be further studied with the measured geometrical and behavioral properties. This project serves as a base for the research of low-voltage and low-power electrostatic actuator, and provides theoretical support to the reliability and stability issues in the polymer microelectromechanical systems.

垂直梳齿执行器在精密仪器和消费电子产品中有非常广泛的应用。电子器件与仪器的微型化和低功耗的趋势要求执行器可在低电压下实现较大扭转位移。本项目针对当前梳齿执行器驱动电压高、位移小的瓶颈问题，使用柔软聚合物替代硅，制作执行器扭转梁，以降低执行器驱动电压。然而该执行器的性能提升受到了聚合物扭转梁低弯曲刚度和蠕变的制约。本项目拟围绕此核心问题，探索聚合物/硅垂直梳齿执行器扭转/平移的多自由度耦合运动和蠕变的规律，并探讨执行器在复杂耦合运动和蠕变下的精确闭环控制方法。项目通过多自由度运动规律建立以高扭转角度/低平移位移为目标的器件设计规则，首次提出聚合物/硅执行器的自对准微加工工艺，加工并表征执行器性能，通过器件的实测几何和性能参数修正模型并更进一步研究器件的多自由度运动和蠕变机理。本项目对低电压、低功耗的静电执行器技术起到推动作用，并为聚合物微机电系统的可靠性和稳定性相关问题提供理论支持。

本项目的目标是解决集成聚合物梁的硅垂直梳齿执行器（刚柔结合式执行器）中由柔性材料引起的耦合运动、蠕变等一系列可靠性问题，为刚柔结合式MEMS器件的实际应用奠定基础。本项目首先探明了集成聚合物梁的垂直梳齿执行器的扭转/平移耦合运动和蠕变的规律，建立了完整的执行器驱动与回复力学模型，并基于模型建立了该类器件的设计规则，完成低压驱动执行器的器件设计。其次，探索并建立了一套针对硅/聚合物刚柔结合式执行器的微加工工艺，优化了各工艺参量，成功加工出了基于自对准垂直梳齿的刚柔结合式MEMS执行器。再次，探明了执行器的多自由度耦合运动及蠕变机理，并提出了针对该器件的精确控制方法。设计并开发出高速高精度梳齿电容的读出电路，并基于该电路开发出了可补偿多自由度耦合运动和扭转蠕变的精确闭环控制系统，解决了柔性梁的可靠性问题。最后，基于所开发的刚柔结合式MEMS器件的微加工工艺以及对刚柔结合结构的研究，初步探索了将刚柔结合式微结构应用于微型振动式能量采集器和振动传感器的可行性，设计并制造了一系列原型验证样机。

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