Energy-Dispersive X-ray Spectrometer and Electron Backscattered Diffractometer for Scanning Electron Microscopy Research

用于扫描电子显微镜研究的能量色散 X 射线光谱仪和电子背散射衍射仪

• 批准号: RTI-2023-00332
• 负责人: Howe, Jane
• 金额: $ 10.93万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=758255
• 关键词: Energy; Dispersive; ray; Spectrometer; Electron

Information of microstructure and chemistry of a material or device is critical in many fields of research. The scanning electron microscope (SEM) is arguably one of the most widely used and powerful characterization instruments for obtaining such microstructural information, from millimeter down to nanometer length scales. Elemental composition of the specimens, and crystallography of crystalline materials are of great importance for applications in advanced manufacturing, bio-imaging and life science, energy, environment and health, mining, geology and petrology, semiconductors and microeletronics. In an SEM, a focused electron beam scans across the surface of a specimen and produces reflected electrons that reveal topographic, crystallographic and morphological information. Specifically, the crystalline information can be obtained from backscattered electrons only if the SEM is equipped with an electron backscattered diffractometer (EBSD). Concomitantly, the so-called "characteristic X-rays" with sharply defined energies are also emitted as a result of the incident electron beam's interaction with the specimen. The characteristic X-rays can be employed for identification and quantification of elements using energy-dispersive X-ray spectroscopy (EDS). University of Toronto has recently acquired a state-of-the-art high-resolution SEM which has been used daily by more than forty researchers (mostly HQP) for over sixty research programs. Without the EDS, we cannot obtain elemental information. Without the EBSD, no crystalline information is available. We hereby request the funds to purchase an EDS detector and an EBSD, which are two essential accessories urgently needed for conducting cutting-edge SEM research at our shared user facility. The addition of proposed instrumentation will support even a broader range of NSERC-funded research programs in advanced manufacturing, energy conversion and production, and forensics, represented by the Application Team (Jane Howe, Doug Perovic, and Cathy Chin) and collaborator Yu Zou. The proposed instrument will be located at the Open Centre for the Characterization of Advanced Materials (OCCAM) shared user facility, and maintained by dedicated personnel. Measures will be taken to ensure the proposed instrumentation has the highest possible degree of utilization and accessibility by all interested researchers per EDI principles. The Applicants and OCCAM have a proven track record in mentoring diverse highly qualified personnel (HQP) in an inclusive research environment and are committed to further break down hidden barriers in research space. HQP will use the state-of-the-art equipment to solve critical problems in the fields of catalysis and energy conversion, corrosion, forensic engineering, materials science, and nuclear energy. They will gain first-hand experience to work with fundamental research coupled with applied, industrially relevant projects.

材料或设备的微观结构和化学信息在许多研究领域都至关重要。扫描电子显微镜 (SEM) 可以说是用于获取从毫米到纳米长度尺度的微观结构信息的最广泛使用和最强大的表征仪器之一。样品的元素组成和晶体材料的晶体学对于先进制造、生物成像和生命科学、能源、环境和健康、采矿、地质和岩石学、半导体和微电子学等领域的应用具有重要意义。 在 SEM 中，聚焦电子束扫描样品表面并产生反射电子，从而揭示形貌、晶体学和形态信息。具体来说，只有当SEM配备电子背散射衍射仪（EBSD）时，才能从背散射电子获得晶体信息。与此同时，由于入射电子束与样本相互作用，也会发射出具有明确能量的所谓“特征 X 射线”。特征 X 射线可用于使用能量色散 X 射线光谱 (EDS) 来识别和量化元素。 多伦多大学最近购买了一台最先进的高分辨率 SEM，每天有 40 多名研究人员（大部分是 HQP）在 60 多个研究项目中使用它。如果没有 EDS，我们就无法获取基本信息。如果没有 EBSD，就无法获得晶体信息。我们特此申请资金购买 EDS 探测器和 EBSD，这是在我们的共享用户设施中进行尖端 SEM 研究急需的两个重要配件。拟议仪器的增加将支持由应用团队（Jane Howe、Doug Perovic 和 Cathy Chin）和合作者 Yu Zou 代表的更广泛的 NSERC 资助的先进制造、能源转换和生产以及取证研究项目。 拟议的仪器将位于先进材料表征开放中心（OCCAM）共享用户设施，并由专人维护。将采取措施确保所有感兴趣的研究人员根据 EDI 原则对所提议的仪器具有最高程度的利用和可访问性。申请人和 OCCAM 在包容性研究环境中指导多元化高素质人才 (HQP) 方面拥有良好的记录，并致力于进一步打破研究领域的隐藏障碍。 HQP将使用最先进的设备来解决催化和能量转换、腐蚀、法医工程、材料科学和核能领域的关键问题。他们将获得基础研究以及应用、工业相关项目的第一手经验。