Energy-Dispersive X-ray Spectrometer and Electron Backscattered Diffractometer for Scanning Electron Microscopy Research

用于扫描电子显微镜研究的能量色散 X 射线光谱仪和电子背散射衍射仪

• 批准号: RTI-2023-00332
• 负责人: Howe, Jane
• 金额: $ 10.93万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=758255
• 关键词: Energy; Dispersive; ray; Spectrometer; Electron

Information of microstructure and chemistry of a material or device is critical in many fields of research. The scanning electron microscope (SEM) is arguably one of the most widely used and powerful characterization instruments for obtaining such microstructural information, from millimeter down to nanometer length scales. Elemental composition of the specimens, and crystallography of crystalline materials are of great importance for applications in advanced manufacturing, bio-imaging and life science, energy, environment and health, mining, geology and petrology, semiconductors and microeletronics. In an SEM, a focused electron beam scans across the surface of a specimen and produces reflected electrons that reveal topographic, crystallographic and morphological information. Specifically, the crystalline information can be obtained from backscattered electrons only if the SEM is equipped with an electron backscattered diffractometer (EBSD). Concomitantly, the so-called "characteristic X-rays" with sharply defined energies are also emitted as a result of the incident electron beam's interaction with the specimen. The characteristic X-rays can be employed for identification and quantification of elements using energy-dispersive X-ray spectroscopy (EDS). University of Toronto has recently acquired a state-of-the-art high-resolution SEM which has been used daily by more than forty researchers (mostly HQP) for over sixty research programs. Without the EDS, we cannot obtain elemental information. Without the EBSD, no crystalline information is available. We hereby request the funds to purchase an EDS detector and an EBSD, which are two essential accessories urgently needed for conducting cutting-edge SEM research at our shared user facility. The addition of proposed instrumentation will support even a broader range of NSERC-funded research programs in advanced manufacturing, energy conversion and production, and forensics, represented by the Application Team (Jane Howe, Doug Perovic, and Cathy Chin) and collaborator Yu Zou. The proposed instrument will be located at the Open Centre for the Characterization of Advanced Materials (OCCAM) shared user facility, and maintained by dedicated personnel. Measures will be taken to ensure the proposed instrumentation has the highest possible degree of utilization and accessibility by all interested researchers per EDI principles. The Applicants and OCCAM have a proven track record in mentoring diverse highly qualified personnel (HQP) in an inclusive research environment and are committed to further break down hidden barriers in research space. HQP will use the state-of-the-art equipment to solve critical problems in the fields of catalysis and energy conversion, corrosion, forensic engineering, materials science, and nuclear energy. They will gain first-hand experience to work with fundamental research coupled with applied, industrially relevant projects.

在许多研究领域，材料或设备的微观结构和化学的信息至关重要。可以说，扫描电子显微镜（SEM）是使用最广泛和最有力的表征工具之一，用于获取此类微观结构信息，从毫米至纳米长度尺度。标本的元素组成，晶体材料的晶体学对于在高级制造，生物成像和生命科学，能源，环境和健康，采矿，地质学和岩石学，半导体和微电子学方面的应用非常重要。 在SEM中，聚焦的电子束在标本的表面上进行扫描，并产生反射的电子，这些电子揭示了地形，晶体学和形态学信息。具体而言，仅当SEM配备了电子反向散射衍射仪（EBSD）时，才能从反向散射电子获得晶体信息。同时，由于入射电子束与试样的相互作用，还发出了所谓的带有明确定义能量的“特征X射线”。特征X射线可用于使用能量分散性X射线光谱（EDS）来识别和定量元件。 多伦多大学最近获得了最先进的高分辨率SEM，该SEM每天已有40多名研究人员（主要是HQP）用于60多个研究计划。没有ED，我们将无法获得元素信息。如果没有EBSD，则没有任何结晶信息。我们特此要求这些资金购买EDS检测器和EBSD，这是在我们的共享用户设施进行尖端SEM研究急需的两个必不可少的配件。提议的仪器的添加将支持更广泛的NSERC资助研究计划，以高级制造，能源转换和生产以及由应用团队（Jane Howe，Doug Perovic和Cathy Chin）和合作者Yu Zou代表的法医。 拟议的仪器将位于开放式材料（OCCAM）共享用户设施的表征，并由专用人员维护。根据EDI原则，所有感兴趣的研究人员都将采取措施确保所提出的仪器具有最高的利用率和可访问性。申请人和OCCAM在包容性的研究环境中指导多样化的高素质人员（HQP）方面具有可靠的记录，并致力于进一步打破研究领域的隐藏障碍。 HQP将使用最先进的设备来解决催化和能量转化，腐蚀，法医工程，材料科学和核能领域的关键问题。他们将获得与基础研究以及应用，工业相关的项目的基础研究的第一手经验。