Design, Fabrication and Characterization of Functional Thin Film Structures

功能薄膜结构的设计、制造和表征

• 批准号: RGPIN-2019-06023
• 负责人: Mascher, Peter
• 金额: $ 2.48万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=738662
• 关键词: Design; Fabrication; Characterization; Functional; Thin

Advanced technologies rely heavily on the engineering of materials with properties and capabilities not found in nature. Examples include thin films, nanostructured materials, and advanced composites with properties superior to those of their constituents. This revolution in materials synthesis, however, would be impossible without the availability of methods of characterization and analysis that can keep pace with the reduced tolerance for defects and the need to understand structure and composition on an atomic scale. In turn, the results of detailed materials analysis can be used to provide feedback to the fabrication and processing stage, thereby further improving materials and device properties and tailoring them for specific applications, including photonics. One of the key distinguishing features of the proposed research program is the intimate link between fabrication and characterization. The long-term objective of this program of research is to design, fabricate and comprehensively characterize complex thin film structures, including -silicon--based systems for photonics applications. The principal aim is to address, in a rigorous research approach and using state--of--the--art research infrastructure, issues with a high potential impact on the science of advanced materials and the manufacturing process. The McMaster Intense Positron Beam Facility , expected to be operational by mid--2019, will give us the capacity to depth-profile open-volume defects in thin film structures, at the level of single missing or misplaced atoms, and under dynamic conditions. It will be unique in Canada and one of only a few operating worldwide. In the next 5 years, we will pursue the following short term objectives: 1) gain a better understanding of features at the atomic level that determine the optical, electronic, and mechanical properties of silicon-based thin film structures, 2) design and optimize materials (such as SiCxNy:H), structures and devices for applications in harsh environments, 3) study in detail the plasma processes leading to desired materials properties, and 4) provide a strong and direct link between advanced materials science and industry-relevant fabrication technology. The HQP participating in the various projects will acquire hands--on experience in areas of high scientific and economic relevance. For example, silicon-based photonic elements are highly desirable components of optical communication systems, solid state lighting, and all-silicon solar cells. Thus, silicon photonics is an internationally hotly pursued field, with potentially massive economic benefits. The HQP will work in some of the best materials research facilities in Canada, in multi--user, multi--disciplinary environments. The collaborations with our international partners provide the HQP with the opportunity to work at renowned laboratories abroad, which ensures a vibrant and stimulating research environment and fosters greater global awareness.

先进技术在很大程度上依赖于具有自然界中不存在的特性和功能的材料工程，例如薄膜、纳米结构材料和具有优于其成分的特性的先进复合材料，但是，如果没有这些材料合成的革命是不可能的。表征和分析方法的可用性可以跟上缺陷容忍度的降低以及在原子尺度上了解结构和成分的需要，反过来，详细材料分析的结果可用于向制造和提供反馈。加工阶段，从而进一步改善材料和器件性能并针对特定应用（包括光子学）对其进行定制。该研究项目的关键区别特征之一是制造和表征之间的密切联系，该研究项目的长期目标是设计、制造和全面表征复杂的薄层。薄膜结构，包括用于光子学应用的硅基系统，其主要目的是通过严格的研究方法并使用最先进的研究基础设施来解决对科学具有重大潜在影响的问题。先进材料和制造麦克马斯特强正电子束设施预计将于 2019 年中期投入运行，将使我们能够在单个缺失或错位原子的水平上，在动态条件下对薄膜结构中的开放体积缺陷进行深度剖析。它将在加拿大是独一无二的，也是全球仅有的几家运营机构之一，在未来 5 年内，我们将追求以下短期目标：1）更好地了解决定光学、硅基薄膜结构的电子和机械性能，2) 设计和优化用于恶劣环境的材料（例如 SiCxNy:H）、结构和器件，3) 详细研究导致所需材料性能的等离子体工艺， 4）在先进材料科学和行业相关制造技术之间建立强有力的直接联系，参与各个项目的总部将获得高度科学和经济相关领域的实践经验，例如硅基光子学。元素是非常理想的组件因此，硅光子学是国际上热门的领域，具有潜在的巨大经济效益，将在加拿大一些最好的材料研究机构中发挥作用。 ——用户、多学科环境。与国际合作伙伴的合作为总部提供了在国外著名实验室工作的机会，这确保了一个充满活力和刺激的研究环境，并培养了更大的全球意识。