New Analytical Techniques using Electron Microscopy for Nano-Materials Characterization in the 0.5 - 30 keV Range

使用电子显微镜在 0.5 - 30 keV 范围内表征纳米材料的新分析技术

• 批准号: 543484-2019
• 负责人: Gauvin, Raynald
• 金额: $ 7.67万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=720723
• 关键词: New; Analytical; Techniques; using; Electron

This CRD aims to further develop characterization techniques with the new SU-9000 CFE-SEM acquired by the applicant in 2017 via a CFI as well as on the SU-8230 CFE-SEM. The SU9000 microscope provides advanced STEM capabilities, especially in the form of specific new transmission mode detectors such as bright-field (BF) and dark-field (DF) detectors, an on-axis diffraction camera for convergent beam electron diffraction (CBED) and a unique low voltage electron energy-loss spectrometer (EELS). (1) The EELS technique at low voltages such as 20 and 30 kV will be studied to understand the impact of low beam energy on its operation and its limitations in order to improve its applicability to a wide range of materials. The possibility of reducing further the beam energy below 20 kV will be investigated. (2) Quantitative low voltage CBED applied to several crystalline systems will be studied to propose a convenient procedure to use this new SEM technology as well as apply post-processing techniques to produce useful results with the technique, which are lacking for now. Its limitations will be assessed as well. (3) The new e-Flash high-resolution electron backscatter diffraction (EBSD) camera from Bruker Inc., installed on the SU8230, will also be tested to define its ability in providing CBED in STEM mode in a state-of-the-art SEM. (4) Finally, since the SU9000 is fitted with the new windowless Extreme x-ray detector from Oxford Instruments, very low voltage x-ray microanalysis will be developed in the range of soft x-rays (0 - 1 kV) since this energy range benefits the most of the absence of a protective window on this type of detectors.

该 CRD 旨在利用申请人于 2017 年通过 CFI 购买的新型 SU-9000 CFE-SEM 以及 SU-8230 CFE-SEM 进一步开发表征技术。 SU9000 显微镜提供先进的 STEM 功能，尤其是特定的新型透射模式探测器，例如明场 (BF) 和暗场 (DF) 探测器、用于会聚束电子衍射 (CBED) 的同轴衍射相机和独特的低压电子能量损失谱仪（EELS）。 （1）将研究20和30 kV等低电压下的EELS技术，以了解低束能量对其操作的影响及其局限性，以提高其对广泛材料的适用性。将研究进一步将束流能量降低至 20 kV 以下的可能性。 (2) 将研究应用于几种晶体系统的定量低压 CBED，以提出一种使用这种新 SEM 技术的便捷程序，并应用后处理技术以利用该技术产生有用的结果，而这是目前所缺乏的。其局限性也将被评估。 (3) 安装在 SU8230 上的布鲁克公司新型 e-Flash 高分辨率电子背散射衍射 (EBSD) 相机也将接受测试，以确定其在 STEM 模式下以最先进的方式提供 CBED 的能力。艺术扫描电镜。 (4) 最后，由于 SU9000 配备了牛津仪器公司的新型无窗 Extreme X 射线探测器，因此将在软 X 射线 (0 - 1 kV) 范围内开发极低电压 X 射线微量分析，因为这种能量由于此类探测器没有保护窗，因此范围最大。