New Analytical Techniques using Electron Microscopy for Nano-Materials Characterization in the 0.5 - 30 keV Range

使用电子显微镜在 0.5 - 30 keV 范围内表征纳米材料的新分析技术

• 批准号: 543484-2019
• 负责人: Gauvin, Raynald
• 金额: $ 7.67万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=720723
• 关键词: New; Analytical; Techniques; using; Electron

This CRD aims to further develop characterization techniques with the new SU-9000 CFE-SEM acquired by the applicant in 2017 via a CFI as well as on the SU-8230 CFE-SEM. The SU9000 microscope provides advanced STEM capabilities, especially in the form of specific new transmission mode detectors such as bright-field (BF) and dark-field (DF) detectors, an on-axis diffraction camera for convergent beam electron diffraction (CBED) and a unique low voltage electron energy-loss spectrometer (EELS). (1) The EELS technique at low voltages such as 20 and 30 kV will be studied to understand the impact of low beam energy on its operation and its limitations in order to improve its applicability to a wide range of materials. The possibility of reducing further the beam energy below 20 kV will be investigated. (2) Quantitative low voltage CBED applied to several crystalline systems will be studied to propose a convenient procedure to use this new SEM technology as well as apply post-processing techniques to produce useful results with the technique, which are lacking for now. Its limitations will be assessed as well. (3) The new e-Flash high-resolution electron backscatter diffraction (EBSD) camera from Bruker Inc., installed on the SU8230, will also be tested to define its ability in providing CBED in STEM mode in a state-of-the-art SEM. (4) Finally, since the SU9000 is fitted with the new windowless Extreme x-ray detector from Oxford Instruments, very low voltage x-ray microanalysis will be developed in the range of soft x-rays (0 - 1 kV) since this energy range benefits the most of the absence of a protective window on this type of detectors.

该CRD旨在通过申请人在2017年通过CFI以及SU-8230 CFE-SEM收购的新的SU-9000 CFE-SEM进一步开发表征技术。 SU9000显微镜提供了先进的茎功能，尤其是以特定的新传输模式探测器的形式，例如明亮场（BF）和深色场（DF）探测器，用于收敛梁电子衍射（CBED）的轴上衍射摄像头以及独特的低压电子功能光谱仪（EELS）。 （1）将研究低压（例如20和30 kV）的鳗鱼技术，以了解低光束能量对其操作及其局限性的影响，以提高其对广泛材料的适用性。将研究进一步降低20 kV梁的可能性。 （2）将研究应用于几种晶体系统的定量低压CBED，以提出一种方便的程序，以使用这种新的SEM技术，并应用后处理技术来通过目前所缺乏的技术产生有用的结果。它的局限性也将被评估。 （3）安装在SU8230上的Bruker Inc.的新型E-Flash高分辨率电子反向散射衍射（EBSD）摄像机也将进行测试，以定义其在最先进的SEM中以STEM模式提供CBED的能力。 （4）最后，由于SU9000配备了牛津仪器的新的无窗口极端X射线探测器，因此将在软X射线（0-1 kV）范围内开发出非常低的电压X射线微分析，因为此能量范围在此类型的检测器上有很多保护窗口的大部分。